JPS51130645A - Method of forming film in vacuum - Google Patents

Method of forming film in vacuum

Info

Publication number
JPS51130645A
JPS51130645A JP5582575A JP5582575A JPS51130645A JP S51130645 A JPS51130645 A JP S51130645A JP 5582575 A JP5582575 A JP 5582575A JP 5582575 A JP5582575 A JP 5582575A JP S51130645 A JPS51130645 A JP S51130645A
Authority
JP
Japan
Prior art keywords
vacuum
forming film
film
forming
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5582575A
Other languages
Japanese (ja)
Other versions
JPS556703B2 (en
Inventor
Kouichi Shinohara
Yasuhiro Shimizu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP5582575A priority Critical patent/JPS51130645A/en
Publication of JPS51130645A publication Critical patent/JPS51130645A/en
Publication of JPS556703B2 publication Critical patent/JPS556703B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP5582575A 1975-05-08 1975-05-08 Method of forming film in vacuum Granted JPS51130645A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5582575A JPS51130645A (en) 1975-05-08 1975-05-08 Method of forming film in vacuum

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5582575A JPS51130645A (en) 1975-05-08 1975-05-08 Method of forming film in vacuum

Publications (2)

Publication Number Publication Date
JPS51130645A true JPS51130645A (en) 1976-11-13
JPS556703B2 JPS556703B2 (en) 1980-02-19

Family

ID=13009725

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5582575A Granted JPS51130645A (en) 1975-05-08 1975-05-08 Method of forming film in vacuum

Country Status (1)

Country Link
JP (1) JPS51130645A (en)

Also Published As

Publication number Publication date
JPS556703B2 (en) 1980-02-19

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