JPS5565107A - Measuring method for film thickness - Google Patents

Measuring method for film thickness

Info

Publication number
JPS5565107A
JPS5565107A JP13893678A JP13893678A JPS5565107A JP S5565107 A JPS5565107 A JP S5565107A JP 13893678 A JP13893678 A JP 13893678A JP 13893678 A JP13893678 A JP 13893678A JP S5565107 A JPS5565107 A JP S5565107A
Authority
JP
Japan
Prior art keywords
rays
series
energy
ratio
intensity
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13893678A
Other languages
Japanese (ja)
Inventor
Haruo Kishida
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Priority to JP13893678A priority Critical patent/JPS5565107A/en
Publication of JPS5565107A publication Critical patent/JPS5565107A/en
Pending legal-status Critical Current

Links

Landscapes

  • Length-Measuring Devices Using Wave Or Particle Radiation (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)

Abstract

PURPOSE: To enable the measurement under a wide variety of conditions such as types of material, state of material, and film thickness, by using mono-color X-rays in spectrum and selecting the energy near the X-ray absorption end of measured substance.
CONSTITUTION: The absorption edge effect is used by using the emitted X-ray having the energy width of comparatively narrow region as measured media. For example, the characteristic X-rays from an element (including the both of emitted X-rays and fluorescent X-rays) have two or more peaks of energy depending on the exciting conditions. The K series rays and the L series rays are generated with sufficient intensity and the lower energy rays, the L series rays in this case, are selected near the absorption edge of measured substance. The ratio of intensity between the K and L series rays of the characteristic X-rays generated is constant independently of the amount of excitation if the excited energy is constant. Since the ratio is remarkably changed when the X-rays transmit through the film, the thickness can be obtained from the ratio of intensity of transmission by experimentally or theoretically calibrating the relation with the thickness.
COPYRIGHT: (C)1980,JPO&Japio
JP13893678A 1978-11-13 1978-11-13 Measuring method for film thickness Pending JPS5565107A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13893678A JPS5565107A (en) 1978-11-13 1978-11-13 Measuring method for film thickness

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13893678A JPS5565107A (en) 1978-11-13 1978-11-13 Measuring method for film thickness

Publications (1)

Publication Number Publication Date
JPS5565107A true JPS5565107A (en) 1980-05-16

Family

ID=15233598

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13893678A Pending JPS5565107A (en) 1978-11-13 1978-11-13 Measuring method for film thickness

Country Status (1)

Country Link
JP (1) JPS5565107A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60202339A (en) * 1984-03-27 1985-10-12 Sumitomo Metal Ind Ltd X-ray fluorescence analysis method
JPS60205309A (en) * 1984-03-30 1985-10-16 Shimadzu Corp Method for measuring thickness of multilayered metallic plate
JPS6239747A (en) * 1985-08-14 1987-02-20 Furukawa Electric Co Ltd:The Method for analyzing composition of article to be measured by x-rays
JPS62194447A (en) * 1986-02-21 1987-08-26 Furukawa Electric Co Ltd:The Method for non-destructive measurement of article to be measured by x-rays

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5180253A (en) * 1975-01-08 1976-07-13 Tokyo Shibaura Electric Co Hoshasenatsumikeino zaishitsuhoseihoho
JPS51123658A (en) * 1975-04-21 1976-10-28 Rigaku Denki Kogyo Kk A measuring method to analyze each dimensions of the compounded metal which composes a single unit

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5180253A (en) * 1975-01-08 1976-07-13 Tokyo Shibaura Electric Co Hoshasenatsumikeino zaishitsuhoseihoho
JPS51123658A (en) * 1975-04-21 1976-10-28 Rigaku Denki Kogyo Kk A measuring method to analyze each dimensions of the compounded metal which composes a single unit

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60202339A (en) * 1984-03-27 1985-10-12 Sumitomo Metal Ind Ltd X-ray fluorescence analysis method
JPS60205309A (en) * 1984-03-30 1985-10-16 Shimadzu Corp Method for measuring thickness of multilayered metallic plate
JPS6239747A (en) * 1985-08-14 1987-02-20 Furukawa Electric Co Ltd:The Method for analyzing composition of article to be measured by x-rays
JPS62194447A (en) * 1986-02-21 1987-08-26 Furukawa Electric Co Ltd:The Method for non-destructive measurement of article to be measured by x-rays

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