JPS5565107A - Measuring method for film thickness - Google Patents
Measuring method for film thicknessInfo
- Publication number
- JPS5565107A JPS5565107A JP13893678A JP13893678A JPS5565107A JP S5565107 A JPS5565107 A JP S5565107A JP 13893678 A JP13893678 A JP 13893678A JP 13893678 A JP13893678 A JP 13893678A JP S5565107 A JPS5565107 A JP S5565107A
- Authority
- JP
- Japan
- Prior art keywords
- rays
- series
- energy
- ratio
- intensity
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Length-Measuring Devices Using Wave Or Particle Radiation (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
Abstract
PURPOSE: To enable the measurement under a wide variety of conditions such as types of material, state of material, and film thickness, by using mono-color X-rays in spectrum and selecting the energy near the X-ray absorption end of measured substance.
CONSTITUTION: The absorption edge effect is used by using the emitted X-ray having the energy width of comparatively narrow region as measured media. For example, the characteristic X-rays from an element (including the both of emitted X-rays and fluorescent X-rays) have two or more peaks of energy depending on the exciting conditions. The K series rays and the L series rays are generated with sufficient intensity and the lower energy rays, the L series rays in this case, are selected near the absorption edge of measured substance. The ratio of intensity between the K and L series rays of the characteristic X-rays generated is constant independently of the amount of excitation if the excited energy is constant. Since the ratio is remarkably changed when the X-rays transmit through the film, the thickness can be obtained from the ratio of intensity of transmission by experimentally or theoretically calibrating the relation with the thickness.
COPYRIGHT: (C)1980,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13893678A JPS5565107A (en) | 1978-11-13 | 1978-11-13 | Measuring method for film thickness |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13893678A JPS5565107A (en) | 1978-11-13 | 1978-11-13 | Measuring method for film thickness |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5565107A true JPS5565107A (en) | 1980-05-16 |
Family
ID=15233598
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP13893678A Pending JPS5565107A (en) | 1978-11-13 | 1978-11-13 | Measuring method for film thickness |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5565107A (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60202339A (en) * | 1984-03-27 | 1985-10-12 | Sumitomo Metal Ind Ltd | X-ray fluorescence analysis method |
JPS60205309A (en) * | 1984-03-30 | 1985-10-16 | Shimadzu Corp | Method for measuring thickness of multilayered metallic plate |
JPS6239747A (en) * | 1985-08-14 | 1987-02-20 | Furukawa Electric Co Ltd:The | Method for analyzing composition of article to be measured by x-rays |
JPS62194447A (en) * | 1986-02-21 | 1987-08-26 | Furukawa Electric Co Ltd:The | Method for non-destructive measurement of article to be measured by x-rays |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5180253A (en) * | 1975-01-08 | 1976-07-13 | Tokyo Shibaura Electric Co | Hoshasenatsumikeino zaishitsuhoseihoho |
JPS51123658A (en) * | 1975-04-21 | 1976-10-28 | Rigaku Denki Kogyo Kk | A measuring method to analyze each dimensions of the compounded metal which composes a single unit |
-
1978
- 1978-11-13 JP JP13893678A patent/JPS5565107A/en active Pending
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5180253A (en) * | 1975-01-08 | 1976-07-13 | Tokyo Shibaura Electric Co | Hoshasenatsumikeino zaishitsuhoseihoho |
JPS51123658A (en) * | 1975-04-21 | 1976-10-28 | Rigaku Denki Kogyo Kk | A measuring method to analyze each dimensions of the compounded metal which composes a single unit |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60202339A (en) * | 1984-03-27 | 1985-10-12 | Sumitomo Metal Ind Ltd | X-ray fluorescence analysis method |
JPS60205309A (en) * | 1984-03-30 | 1985-10-16 | Shimadzu Corp | Method for measuring thickness of multilayered metallic plate |
JPS6239747A (en) * | 1985-08-14 | 1987-02-20 | Furukawa Electric Co Ltd:The | Method for analyzing composition of article to be measured by x-rays |
JPS62194447A (en) * | 1986-02-21 | 1987-08-26 | Furukawa Electric Co Ltd:The | Method for non-destructive measurement of article to be measured by x-rays |
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