JPS5562567U - - Google Patents
Info
- Publication number
- JPS5562567U JPS5562567U JP14349878U JP14349878U JPS5562567U JP S5562567 U JPS5562567 U JP S5562567U JP 14349878 U JP14349878 U JP 14349878U JP 14349878 U JP14349878 U JP 14349878U JP S5562567 U JPS5562567 U JP S5562567U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14349878U JPS5562567U (ja) | 1978-10-20 | 1978-10-20 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14349878U JPS5562567U (ja) | 1978-10-20 | 1978-10-20 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5562567U true JPS5562567U (ja) | 1980-04-28 |
Family
ID=29121235
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP14349878U Pending JPS5562567U (ja) | 1978-10-20 | 1978-10-20 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5562567U (ja) |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4961031A (ja) * | 1972-10-17 | 1974-06-13 | ||
JPS5037685A (ja) * | 1973-08-07 | 1975-04-08 | ||
JPS50152985A (ja) * | 1974-05-31 | 1975-12-09 | ||
JPS5167274A (ja) * | 1974-12-09 | 1976-06-10 | Nichiden Varian Kk | |
JPS53114786A (en) * | 1977-03-18 | 1978-10-06 | Toko Inc | Method of manufacturing zinc oxide thin film |
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1978
- 1978-10-20 JP JP14349878U patent/JPS5562567U/ja active Pending
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4961031A (ja) * | 1972-10-17 | 1974-06-13 | ||
JPS5037685A (ja) * | 1973-08-07 | 1975-04-08 | ||
JPS50152985A (ja) * | 1974-05-31 | 1975-12-09 | ||
JPS5167274A (ja) * | 1974-12-09 | 1976-06-10 | Nichiden Varian Kk | |
JPS53114786A (en) * | 1977-03-18 | 1978-10-06 | Toko Inc | Method of manufacturing zinc oxide thin film |