Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
RIGAKU DENKI KK
Rigaku Denki Co Ltd
Original Assignee
RIGAKU DENKI KK
Rigaku Denki Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by RIGAKU DENKI KK, Rigaku Denki Co LtdfiledCriticalRIGAKU DENKI KK
Priority to JP13587578ApriorityCriticalpatent/JPS5562353A/ja
Publication of JPS5562353ApublicationCriticalpatent/JPS5562353A/ja
Publication of JPS6152427B2publicationCriticalpatent/JPS6152427B2/ja