JPS5560946A - Photomask structure and method of making same - Google Patents
Photomask structure and method of making sameInfo
- Publication number
- JPS5560946A JPS5560946A JP10562179A JP10562179A JPS5560946A JP S5560946 A JPS5560946 A JP S5560946A JP 10562179 A JP10562179 A JP 10562179A JP 10562179 A JP10562179 A JP 10562179A JP S5560946 A JPS5560946 A JP S5560946A
- Authority
- JP
- Japan
- Prior art keywords
- making same
- photomask structure
- photomask
- making
- same
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
- G03F1/54—Absorbers, e.g. of opaque materials
- G03F1/56—Organic absorbers, e.g. of photo-resists
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
- G03F1/54—Absorbers, e.g. of opaque materials
- G03F1/58—Absorbers, e.g. of opaque materials having two or more different absorber layers, e.g. stacked multilayer absorbers
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/26—Processing photosensitive materials; Apparatus therefor
- G03F7/40—Treatment after imagewise removal, e.g. baking
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Preparing Plates And Mask In Photomechanical Process (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Glass Compositions (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
SU782675175A SU938338A1 (en) | 1978-10-30 | 1978-10-30 | Mask and method of manufacturing thereof |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5560946A true JPS5560946A (en) | 1980-05-08 |
Family
ID=20789759
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP10562179A Pending JPS5560946A (en) | 1978-10-30 | 1979-08-21 | Photomask structure and method of making same |
Country Status (6)
Country | Link |
---|---|
JP (1) | JPS5560946A (en) |
CS (1) | CS215215B1 (en) |
DD (1) | DD148177A3 (en) |
DE (1) | DE2930416C2 (en) |
FR (1) | FR2440568A1 (en) |
SU (1) | SU938338A1 (en) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3525800A1 (en) * | 1985-07-19 | 1987-01-22 | Philips Patentverwaltung | Circuit arrangement for a television receiver with a controllable intermediate-frequency video signal amplifier |
EP0714119B1 (en) * | 1990-05-09 | 2002-12-04 | Canon Kabushiki Kaisha | Pattern forming process and process for preparing semiconductor device utilizing said pattern forming process |
DE19721524A1 (en) * | 1997-05-22 | 1998-11-26 | Hsm Gmbh | Method of making an embossing cylinder |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3622319A (en) * | 1966-10-20 | 1971-11-23 | Western Electric Co | Nonreflecting photomasks and methods of making same |
-
1978
- 1978-10-30 SU SU782675175A patent/SU938338A1/en active
-
1979
- 1979-07-26 DE DE19792930416 patent/DE2930416C2/en not_active Expired
- 1979-08-21 JP JP10562179A patent/JPS5560946A/en active Pending
- 1979-09-27 FR FR7924060A patent/FR2440568A1/en active Pending
- 1979-10-18 CS CS708579A patent/CS215215B1/en unknown
- 1979-10-26 DD DD21649479A patent/DD148177A3/en not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
CS215215B1 (en) | 1982-08-27 |
FR2440568A1 (en) | 1980-05-30 |
DE2930416C2 (en) | 1982-05-13 |
DD148177A3 (en) | 1981-05-13 |
SU938338A1 (en) | 1982-06-23 |
DE2930416A1 (en) | 1980-05-14 |
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