JPS5559712A - Method of manufacturing thin film capacitor - Google Patents

Method of manufacturing thin film capacitor

Info

Publication number
JPS5559712A
JPS5559712A JP13265578A JP13265578A JPS5559712A JP S5559712 A JPS5559712 A JP S5559712A JP 13265578 A JP13265578 A JP 13265578A JP 13265578 A JP13265578 A JP 13265578A JP S5559712 A JPS5559712 A JP S5559712A
Authority
JP
Japan
Prior art keywords
thin film
film capacitor
manufacturing thin
manufacturing
capacitor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13265578A
Other languages
Japanese (ja)
Inventor
Yasuo Tanaka
Taiji Shimomoto
Akio Kumada
Shigetoshi Hiratsuka
Takao Sasaki
Eiichi Maruyama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP13265578A priority Critical patent/JPS5559712A/en
Publication of JPS5559712A publication Critical patent/JPS5559712A/en
Pending legal-status Critical Current

Links

JP13265578A 1978-10-30 1978-10-30 Method of manufacturing thin film capacitor Pending JPS5559712A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13265578A JPS5559712A (en) 1978-10-30 1978-10-30 Method of manufacturing thin film capacitor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13265578A JPS5559712A (en) 1978-10-30 1978-10-30 Method of manufacturing thin film capacitor

Publications (1)

Publication Number Publication Date
JPS5559712A true JPS5559712A (en) 1980-05-06

Family

ID=15086393

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13265578A Pending JPS5559712A (en) 1978-10-30 1978-10-30 Method of manufacturing thin film capacitor

Country Status (1)

Country Link
JP (1) JPS5559712A (en)

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