JPS5678113A - Method of manufacturing thin film capacitor - Google Patents

Method of manufacturing thin film capacitor

Info

Publication number
JPS5678113A
JPS5678113A JP15365679A JP15365679A JPS5678113A JP S5678113 A JPS5678113 A JP S5678113A JP 15365679 A JP15365679 A JP 15365679A JP 15365679 A JP15365679 A JP 15365679A JP S5678113 A JPS5678113 A JP S5678113A
Authority
JP
Japan
Prior art keywords
thin film
film capacitor
manufacturing thin
manufacturing
capacitor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15365679A
Other languages
Japanese (ja)
Inventor
Shinji Yoshida
Tatsuo Shirakawa
Giichi Saitou
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP15365679A priority Critical patent/JPS5678113A/en
Publication of JPS5678113A publication Critical patent/JPS5678113A/en
Pending legal-status Critical Current

Links

Landscapes

  • Fixed Capacitors And Capacitor Manufacturing Machines (AREA)
JP15365679A 1979-11-29 1979-11-29 Method of manufacturing thin film capacitor Pending JPS5678113A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15365679A JPS5678113A (en) 1979-11-29 1979-11-29 Method of manufacturing thin film capacitor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15365679A JPS5678113A (en) 1979-11-29 1979-11-29 Method of manufacturing thin film capacitor

Publications (1)

Publication Number Publication Date
JPS5678113A true JPS5678113A (en) 1981-06-26

Family

ID=15567297

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15365679A Pending JPS5678113A (en) 1979-11-29 1979-11-29 Method of manufacturing thin film capacitor

Country Status (1)

Country Link
JP (1) JPS5678113A (en)

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