JPS5558658U - - Google Patents
Info
- Publication number
- JPS5558658U JPS5558658U JP14082178U JP14082178U JPS5558658U JP S5558658 U JPS5558658 U JP S5558658U JP 14082178 U JP14082178 U JP 14082178U JP 14082178 U JP14082178 U JP 14082178U JP S5558658 U JPS5558658 U JP S5558658U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14082178U JPS5558658U (enExample) | 1978-10-16 | 1978-10-16 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14082178U JPS5558658U (enExample) | 1978-10-16 | 1978-10-16 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5558658U true JPS5558658U (enExample) | 1980-04-21 |
Family
ID=29116130
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14082178U Pending JPS5558658U (enExample) | 1978-10-16 | 1978-10-16 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5558658U (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57161057A (en) * | 1981-03-30 | 1982-10-04 | Mitsubishi Electric Corp | Chemical vapor phase growth device using plasma |
-
1978
- 1978-10-16 JP JP14082178U patent/JPS5558658U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57161057A (en) * | 1981-03-30 | 1982-10-04 | Mitsubishi Electric Corp | Chemical vapor phase growth device using plasma |