JPS5558658U - - Google Patents

Info

Publication number
JPS5558658U
JPS5558658U JP14082178U JP14082178U JPS5558658U JP S5558658 U JPS5558658 U JP S5558658U JP 14082178 U JP14082178 U JP 14082178U JP 14082178 U JP14082178 U JP 14082178U JP S5558658 U JPS5558658 U JP S5558658U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14082178U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP14082178U priority Critical patent/JPS5558658U/ja
Publication of JPS5558658U publication Critical patent/JPS5558658U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
JP14082178U 1978-10-16 1978-10-16 Pending JPS5558658U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14082178U JPS5558658U (enrdf_load_stackoverflow) 1978-10-16 1978-10-16

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14082178U JPS5558658U (enrdf_load_stackoverflow) 1978-10-16 1978-10-16

Publications (1)

Publication Number Publication Date
JPS5558658U true JPS5558658U (enrdf_load_stackoverflow) 1980-04-21

Family

ID=29116130

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14082178U Pending JPS5558658U (enrdf_load_stackoverflow) 1978-10-16 1978-10-16

Country Status (1)

Country Link
JP (1) JPS5558658U (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57161057A (en) * 1981-03-30 1982-10-04 Mitsubishi Electric Corp Chemical vapor phase growth device using plasma

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57161057A (en) * 1981-03-30 1982-10-04 Mitsubishi Electric Corp Chemical vapor phase growth device using plasma

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