JPS5555957U - - Google Patents

Info

Publication number
JPS5555957U
JPS5555957U JP13792978U JP13792978U JPS5555957U JP S5555957 U JPS5555957 U JP S5555957U JP 13792978 U JP13792978 U JP 13792978U JP 13792978 U JP13792978 U JP 13792978U JP S5555957 U JPS5555957 U JP S5555957U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13792978U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP13792978U priority Critical patent/JPS5555957U/ja
Publication of JPS5555957U publication Critical patent/JPS5555957U/ja
Pending legal-status Critical Current

Links

JP13792978U 1978-10-09 1978-10-09 Pending JPS5555957U (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13792978U JPS5555957U (de) 1978-10-09 1978-10-09

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13792978U JPS5555957U (de) 1978-10-09 1978-10-09

Publications (1)

Publication Number Publication Date
JPS5555957U true JPS5555957U (de) 1980-04-16

Family

ID=29110610

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13792978U Pending JPS5555957U (de) 1978-10-09 1978-10-09

Country Status (1)

Country Link
JP (1) JPS5555957U (de)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57177641U (de) * 1981-04-30 1982-11-10
JPS584349U (ja) * 1981-06-30 1983-01-12 日立金属株式会社 両面研摩機用キヤリヤ
JPS59201756A (ja) * 1983-04-25 1984-11-15 Matsushima Kogyo Co Ltd 研磨キヤリア
JPS60249568A (ja) * 1984-05-21 1985-12-10 Sumitomo Electric Ind Ltd 半導体ウエハの研磨方法
JPS6224964A (ja) * 1985-07-12 1987-02-02 ワツカ−・ケミトロニク・ゲゼルシヤフト・フユア・エレクトロニク・グルントシユトツフエ・ミツト・ベシユレンクテル・ハフツング 円板形工作物の両面研摩加工方法および円板担体

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57177641U (de) * 1981-04-30 1982-11-10
JPS584349U (ja) * 1981-06-30 1983-01-12 日立金属株式会社 両面研摩機用キヤリヤ
JPS59201756A (ja) * 1983-04-25 1984-11-15 Matsushima Kogyo Co Ltd 研磨キヤリア
JPS60249568A (ja) * 1984-05-21 1985-12-10 Sumitomo Electric Ind Ltd 半導体ウエハの研磨方法
JPS6224964A (ja) * 1985-07-12 1987-02-02 ワツカ−・ケミトロニク・ゲゼルシヤフト・フユア・エレクトロニク・グルントシユトツフエ・ミツト・ベシユレンクテル・ハフツング 円板形工作物の両面研摩加工方法および円板担体

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