JPS555587B2 - - Google Patents

Info

Publication number
JPS555587B2
JPS555587B2 JP8499075A JP8499075A JPS555587B2 JP S555587 B2 JPS555587 B2 JP S555587B2 JP 8499075 A JP8499075 A JP 8499075A JP 8499075 A JP8499075 A JP 8499075A JP S555587 B2 JPS555587 B2 JP S555587B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP8499075A
Other versions
JPS5252133A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP8499075A priority Critical patent/JPS5252133A/ja
Publication of JPS5252133A publication Critical patent/JPS5252133A/ja
Publication of JPS555587B2 publication Critical patent/JPS555587B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Coating Of Shaped Articles Made Of Macromolecular Substances (AREA)
JP8499075A 1975-07-11 1975-07-11 Continuous film coating apparatus Granted JPS5252133A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8499075A JPS5252133A (en) 1975-07-11 1975-07-11 Continuous film coating apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8499075A JPS5252133A (en) 1975-07-11 1975-07-11 Continuous film coating apparatus

Publications (2)

Publication Number Publication Date
JPS5252133A JPS5252133A (en) 1977-04-26
JPS555587B2 true JPS555587B2 (ja) 1980-02-07

Family

ID=13846053

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8499075A Granted JPS5252133A (en) 1975-07-11 1975-07-11 Continuous film coating apparatus

Country Status (1)

Country Link
JP (1) JPS5252133A (ja)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4356073A (en) * 1981-02-12 1982-10-26 Shatterproof Glass Corporation Magnetron cathode sputtering apparatus
JPS59162274A (ja) * 1983-03-07 1984-09-13 Anelva Corp 連続薄膜製造装置
US4517070A (en) * 1984-06-28 1985-05-14 General Motors Corporation Magnetron sputtering cathode assembly and magnet assembly therefor
JPS61266571A (ja) * 1985-05-21 1986-11-26 Toyoda Gosei Co Ltd スパツタリング装置
JPS61266573A (ja) * 1985-05-21 1986-11-26 Toyoda Gosei Co Ltd スパツタリング装置
JPS61266572A (ja) * 1985-05-21 1986-11-26 Toyoda Gosei Co Ltd スパツタリング装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3829373A (en) * 1973-01-12 1974-08-13 Coulter Information Systems Thin film deposition apparatus using segmented target means
JPS5023382A (ja) * 1973-07-05 1975-03-13

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5127246Y2 (ja) * 1972-08-17 1976-07-10

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3829373A (en) * 1973-01-12 1974-08-13 Coulter Information Systems Thin film deposition apparatus using segmented target means
JPS5023382A (ja) * 1973-07-05 1975-03-13

Also Published As

Publication number Publication date
JPS5252133A (en) 1977-04-26

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