JPS555585B2 - - Google Patents

Info

Publication number
JPS555585B2
JPS555585B2 JP2166775A JP2166775A JPS555585B2 JP S555585 B2 JPS555585 B2 JP S555585B2 JP 2166775 A JP2166775 A JP 2166775A JP 2166775 A JP2166775 A JP 2166775A JP S555585 B2 JPS555585 B2 JP S555585B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP2166775A
Other languages
Japanese (ja)
Other versions
JPS5196787A (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP2166775A priority Critical patent/JPS555585B2/ja
Publication of JPS5196787A publication Critical patent/JPS5196787A/ja
Publication of JPS555585B2 publication Critical patent/JPS555585B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP2166775A 1975-02-21 1975-02-21 Expired JPS555585B2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2166775A JPS555585B2 (enrdf_load_stackoverflow) 1975-02-21 1975-02-21

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2166775A JPS555585B2 (enrdf_load_stackoverflow) 1975-02-21 1975-02-21

Publications (2)

Publication Number Publication Date
JPS5196787A JPS5196787A (enrdf_load_stackoverflow) 1976-08-25
JPS555585B2 true JPS555585B2 (enrdf_load_stackoverflow) 1980-02-07

Family

ID=12061380

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2166775A Expired JPS555585B2 (enrdf_load_stackoverflow) 1975-02-21 1975-02-21

Country Status (1)

Country Link
JP (1) JPS555585B2 (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5928033Y2 (ja) * 1977-08-19 1984-08-14 松下電器産業株式会社 スパツタリング装置

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS494200A (enrdf_load_stackoverflow) * 1972-05-06 1974-01-14

Also Published As

Publication number Publication date
JPS5196787A (enrdf_load_stackoverflow) 1976-08-25

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