JPS555232Y2 - - Google Patents

Info

Publication number
JPS555232Y2
JPS555232Y2 JP8622976U JP8622976U JPS555232Y2 JP S555232 Y2 JPS555232 Y2 JP S555232Y2 JP 8622976 U JP8622976 U JP 8622976U JP 8622976 U JP8622976 U JP 8622976U JP S555232 Y2 JPS555232 Y2 JP S555232Y2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP8622976U
Other languages
Japanese (ja)
Other versions
JPS532788U (OSRAM
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP8622976U priority Critical patent/JPS555232Y2/ja
Publication of JPS532788U publication Critical patent/JPS532788U/ja
Application granted granted Critical
Publication of JPS555232Y2 publication Critical patent/JPS555232Y2/ja
Expired legal-status Critical Current

Links

JP8622976U 1976-06-28 1976-06-28 Expired JPS555232Y2 (OSRAM)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8622976U JPS555232Y2 (OSRAM) 1976-06-28 1976-06-28

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8622976U JPS555232Y2 (OSRAM) 1976-06-28 1976-06-28

Publications (2)

Publication Number Publication Date
JPS532788U JPS532788U (OSRAM) 1978-01-11
JPS555232Y2 true JPS555232Y2 (OSRAM) 1980-02-06

Family

ID=28568630

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8622976U Expired JPS555232Y2 (OSRAM) 1976-06-28 1976-06-28

Country Status (1)

Country Link
JP (1) JPS555232Y2 (OSRAM)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006035347A (ja) * 2004-07-23 2006-02-09 Toshiba Corp 研磨装置及び研磨方法

Also Published As

Publication number Publication date
JPS532788U (OSRAM) 1978-01-11

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