JPS5551018B2 - - Google Patents

Info

Publication number
JPS5551018B2
JPS5551018B2 JP7973373A JP7973373A JPS5551018B2 JP S5551018 B2 JPS5551018 B2 JP S5551018B2 JP 7973373 A JP7973373 A JP 7973373A JP 7973373 A JP7973373 A JP 7973373A JP S5551018 B2 JPS5551018 B2 JP S5551018B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP7973373A
Other languages
Japanese (ja)
Other versions
JPS4953140A (sl
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPS4953140A publication Critical patent/JPS4953140A/ja
Publication of JPS5551018B2 publication Critical patent/JPS5551018B2/ja
Expired legal-status Critical Current

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24Vacuum evaporation
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/0005Separation of the coating from the substrate

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
JP7973373A 1972-07-14 1973-07-14 Expired JPS5551018B2 (sl)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB3307572A GB1434016A (en) 1972-07-14 1972-07-14 Alloy production

Publications (2)

Publication Number Publication Date
JPS4953140A JPS4953140A (sl) 1974-05-23
JPS5551018B2 true JPS5551018B2 (sl) 1980-12-22

Family

ID=10348218

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7973373A Expired JPS5551018B2 (sl) 1972-07-14 1973-07-14

Country Status (5)

Country Link
JP (1) JPS5551018B2 (sl)
CA (1) CA1016820A (sl)
DE (1) DE2335302A1 (sl)
FR (1) FR2193091B1 (sl)
GB (1) GB1434016A (sl)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6022897A (ja) * 1984-06-13 1985-02-05 Matsushita Electric Ind Co Ltd マイクロホン
JPS6137416U (ja) * 1984-08-09 1986-03-08 日産自動車株式会社 内燃機関の排気微粒子処理装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6022897A (ja) * 1984-06-13 1985-02-05 Matsushita Electric Ind Co Ltd マイクロホン
JPS6137416U (ja) * 1984-08-09 1986-03-08 日産自動車株式会社 内燃機関の排気微粒子処理装置

Also Published As

Publication number Publication date
GB1434016A (en) 1976-04-28
CA1016820A (en) 1977-09-06
DE2335302A1 (de) 1974-01-31
FR2193091A1 (sl) 1974-02-15
FR2193091B1 (sl) 1977-02-18
JPS4953140A (sl) 1974-05-23

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