JPS555099B2 - - Google Patents
Info
- Publication number
- JPS555099B2 JPS555099B2 JP13456076A JP13456076A JPS555099B2 JP S555099 B2 JPS555099 B2 JP S555099B2 JP 13456076 A JP13456076 A JP 13456076A JP 13456076 A JP13456076 A JP 13456076A JP S555099 B2 JPS555099 B2 JP S555099B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Addition Polymer Or Copolymer, Post-Treatments, Or Chemical Modifications (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13456076A JPS5382502A (en) | 1976-11-09 | 1976-11-09 | Photosensitive composition |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13456076A JPS5382502A (en) | 1976-11-09 | 1976-11-09 | Photosensitive composition |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5382502A JPS5382502A (en) | 1978-07-21 |
| JPS555099B2 true JPS555099B2 (Sortimente) | 1980-02-04 |
Family
ID=15131177
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13456076A Granted JPS5382502A (en) | 1976-11-09 | 1976-11-09 | Photosensitive composition |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5382502A (Sortimente) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2009099083A1 (ja) * | 2008-02-05 | 2009-08-13 | Nec Corporation | アクリルアミド系ポリマー、アクリルアミド化合物、化学増幅型感光性樹脂組成物及びパターン形成方法 |
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1976
- 1976-11-09 JP JP13456076A patent/JPS5382502A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5382502A (en) | 1978-07-21 |