JPS5550114B2 - - Google Patents

Info

Publication number
JPS5550114B2
JPS5550114B2 JP15444475A JP15444475A JPS5550114B2 JP S5550114 B2 JPS5550114 B2 JP S5550114B2 JP 15444475 A JP15444475 A JP 15444475A JP 15444475 A JP15444475 A JP 15444475A JP S5550114 B2 JPS5550114 B2 JP S5550114B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP15444475A
Other languages
Japanese (ja)
Other versions
JPS5277840A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP15444475A priority Critical patent/JPS5277840A/ja
Publication of JPS5277840A publication Critical patent/JPS5277840A/ja
Publication of JPS5550114B2 publication Critical patent/JPS5550114B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • ing And Chemical Polishing (AREA)
  • Drying Of Semiconductors (AREA)
JP15444475A 1975-12-24 1975-12-24 Device for chemical dry etching Granted JPS5277840A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15444475A JPS5277840A (en) 1975-12-24 1975-12-24 Device for chemical dry etching

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15444475A JPS5277840A (en) 1975-12-24 1975-12-24 Device for chemical dry etching

Publications (2)

Publication Number Publication Date
JPS5277840A JPS5277840A (en) 1977-06-30
JPS5550114B2 true JPS5550114B2 (enrdf_load_html_response) 1980-12-16

Family

ID=15584329

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15444475A Granted JPS5277840A (en) 1975-12-24 1975-12-24 Device for chemical dry etching

Country Status (1)

Country Link
JP (1) JPS5277840A (enrdf_load_html_response)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4270999A (en) * 1979-09-28 1981-06-02 International Business Machines Corporation Method and apparatus for gas feed control in a dry etching process
JPS5776188A (en) * 1980-10-29 1982-05-13 Fujitsu Ltd Gas plasma etching device
JPS6394628A (ja) * 1986-10-09 1988-04-25 Tokuda Seisakusho Ltd ドライエツチング装置

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS576691B2 (enrdf_load_html_response) * 1972-06-17 1982-02-06

Also Published As

Publication number Publication date
JPS5277840A (en) 1977-06-30

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