JPS55501040A - - Google Patents

Info

Publication number
JPS55501040A
JPS55501040A JP50019079A JP50019079A JPS55501040A JP S55501040 A JPS55501040 A JP S55501040A JP 50019079 A JP50019079 A JP 50019079A JP 50019079 A JP50019079 A JP 50019079A JP S55501040 A JPS55501040 A JP S55501040A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP50019079A
Other languages
Japanese (ja)
Other versions
JPH0413863B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPS55501040A publication Critical patent/JPS55501040A/ja
Publication of JPH0413863B2 publication Critical patent/JPH0413863B2/ja
Expired legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/76Making of isolation regions between components
    • H01L21/762Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers
    • H01L21/76297Dielectric isolation using EPIC techniques, i.e. epitaxial passivated integrated circuit
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D84/00Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
    • H10D84/60Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers characterised by the integration of at least one component covered by groups H10D10/00 or H10D18/00, e.g. integration of BJTs
    • H10D84/67Complementary BJTs
    • H10D84/673Vertical complementary BJTs

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Bipolar Transistors (AREA)
  • Bipolar Integrated Circuits (AREA)
  • Gyroscopes (AREA)
  • Lasers (AREA)
JP55500190A 1978-12-20 1979-12-06 Expired JPH0413863B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US05/971,632 US4232328A (en) 1978-12-20 1978-12-20 Dielectrically-isolated integrated circuit complementary transistors for high voltage use

Publications (2)

Publication Number Publication Date
JPS55501040A true JPS55501040A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1980-11-27
JPH0413863B2 JPH0413863B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1992-03-11

Family

ID=25518630

Family Applications (1)

Application Number Title Priority Date Filing Date
JP55500190A Expired JPH0413863B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1978-12-20 1979-12-06

Country Status (12)

Country Link
US (1) US4232328A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JP (1) JPH0413863B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
BE (1) BE880726A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
CA (1) CA1126875A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
DE (1) DE2953394T1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
ES (1) ES487064A1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
FR (1) FR2445027A1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
GB (1) GB2049281A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
IT (1) IT1126601B (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
NL (1) NL7920182A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
SE (1) SE424028B (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
WO (1) WO1980001335A1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA1177148A (en) * 1981-10-06 1984-10-30 Robert J. Mcintyre Avalanche photodiode array
US4631570A (en) * 1984-07-03 1986-12-23 Motorola, Inc. Integrated circuit having buried oxide isolation and low resistivity substrate for power supply interconnection
US5448100A (en) * 1985-02-19 1995-09-05 Harris Corporation Breakdown diode structure
JPH01123417A (ja) * 1987-11-07 1989-05-16 Mitsubishi Electric Corp 半導体装置の製造方法
US5416354A (en) * 1989-01-06 1995-05-16 Unitrode Corporation Inverted epitaxial process semiconductor devices
DE69033619T2 (de) * 1990-01-08 2001-04-26 Harris Corp Verfahren zur Verwendung einer Halbleiteranordnung mit einem Substrat, das eine dielektrisch isolierte Halbleiterinsel aufweist
US6375741B2 (en) 1991-03-06 2002-04-23 Timothy J. Reardon Semiconductor processing spray coating apparatus
JP2654268B2 (ja) * 1991-05-13 1997-09-17 株式会社東芝 半導体装置の使用方法
US5744851A (en) * 1992-01-27 1998-04-28 Harris Corporation Biasing of island-surrounding material to suppress reduction of breakdown voltage due to field plate acting on buried layer/island junction between high and low impurity concentration regions
GB2344689A (en) * 1998-12-07 2000-06-14 Ericsson Telefon Ab L M Analogue switch
JP2004510145A (ja) * 2000-09-20 2004-04-02 モレキュラー・リフレクションズ 共鳴センサーとして使用するための微細加工された超音波アレイ

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL91725C (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1952-12-16
US3850707A (en) * 1964-09-09 1974-11-26 Honeywell Inc Semiconductors
US3412295A (en) * 1965-10-19 1968-11-19 Sprague Electric Co Monolithic structure with three-region complementary transistors
DE1816081A1 (de) * 1968-12-20 1970-06-25 Siemens Ag Integrierte Halbleiterschaltungsanordnung
GB1258382A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1969-01-16 1971-12-30
US3628064A (en) * 1969-03-13 1971-12-14 Signetics Corp Voltage to frequency converter with constant current sources
US3953255A (en) * 1971-12-06 1976-04-27 Harris Corporation Fabrication of matched complementary transistors in integrated circuits
US3865649A (en) * 1972-10-16 1975-02-11 Harris Intertype Corp Fabrication of MOS devices and complementary bipolar transistor devices in a monolithic substrate
US3944447A (en) * 1973-03-12 1976-03-16 Ibm Corporation Method for fabrication of integrated circuit structure with full dielectric isolation utilizing selective oxidation
US3895392A (en) * 1973-04-05 1975-07-15 Signetics Corp Bipolar transistor structure having ion implanted region and method
US4042949A (en) * 1974-05-08 1977-08-16 Motorola, Inc. Semiconductor devices
US4146905A (en) * 1974-06-18 1979-03-27 U.S. Philips Corporation Semiconductor device having complementary transistor structures and method of manufacturing same
NL7408110A (nl) * 1974-06-18 1975-12-22 Philips Nv Halfgeleiderinrichting met complementaire tran- sistorstrukturen en werkwijze ter vervaardiging daarvan.
US4086610A (en) * 1974-06-28 1978-04-25 Motorola, Inc. High reliability epi-base radiation hardened power transistor
US3990102A (en) * 1974-06-28 1976-11-02 Hitachi, Ltd. Semiconductor integrated circuits and method of manufacturing the same

Also Published As

Publication number Publication date
GB2049281A (en) 1980-12-17
IT1126601B (it) 1986-05-21
NL7920182A (nl) 1980-10-31
US4232328A (en) 1980-11-04
FR2445027B1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1984-03-09
GB2049281B (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
FR2445027A1 (fr) 1980-07-18
CA1126875A (en) 1982-06-29
ES487064A1 (es) 1980-09-16
SE424028B (sv) 1982-06-21
IT7928204A0 (it) 1979-12-19
WO1980001335A1 (en) 1980-06-26
DE2953394C2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1993-01-07
DE2953394T1 (de) 1981-01-08
SE8005704L (sv) 1980-08-13
BE880726A (fr) 1980-04-16
JPH0413863B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1992-03-11

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