JPS55500883A - - Google Patents

Info

Publication number
JPS55500883A
JPS55500883A JP50208479A JP50208479A JPS55500883A JP S55500883 A JPS55500883 A JP S55500883A JP 50208479 A JP50208479 A JP 50208479A JP 50208479 A JP50208479 A JP 50208479A JP S55500883 A JPS55500883 A JP S55500883A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP50208479A
Other versions
JPS6239705B2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPS55500883A publication Critical patent/JPS55500883A/ja
Publication of JPS6239705B2 publication Critical patent/JPS6239705B2/ja
Expired legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/22Details, e.g. general constructional or apparatus details
    • G01N29/24Probes
    • G01N29/2418Probes using optoacoustic interaction with the material, e.g. laser radiation, photoacoustics
    • G01N29/2425Probes using optoacoustic interaction with the material, e.g. laser radiation, photoacoustics optoacoustic fluid cells therefor
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/1702Systems in which incident light is modified in accordance with the properties of the material investigated with opto-acoustic detection, e.g. for gases or analysing solids
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/04Analysing solids
    • G01N29/06Visualisation of the interior, e.g. acoustic microscopy
    • G01N29/0654Imaging
    • G01N29/0681Imaging by acoustic microscopy, e.g. scanning acoustic microscopy
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00Indexing codes associated with group G01N29/00
    • G01N2291/02Indexing codes associated with the analysed material
    • G01N2291/028Material parameters
    • G01N2291/02881Temperature
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00Indexing codes associated with group G01N29/00
    • G01N2291/04Wave modes and trajectories
    • G01N2291/042Wave modes
    • G01N2291/0423Surface waves, e.g. Rayleigh waves, Love waves

Landscapes

  • Physics & Mathematics (AREA)
  • Biochemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Optics & Photonics (AREA)
  • Acoustics & Sound (AREA)
  • Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
JP54502084A 1978-11-01 1979-10-26 Expired JPS6239705B2 (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US05/956,668 US4255971A (en) 1978-11-01 1978-11-01 Thermoacoustic microscopy

Publications (2)

Publication Number Publication Date
JPS55500883A true JPS55500883A (ja) 1980-10-30
JPS6239705B2 JPS6239705B2 (ja) 1987-08-25

Family

ID=25498521

Family Applications (1)

Application Number Title Priority Date Filing Date
JP54502084A Expired JPS6239705B2 (ja) 1978-11-01 1979-10-26

Country Status (5)

Country Link
US (1) US4255971A (ja)
JP (1) JPS6239705B2 (ja)
DE (1) DE2953286A1 (ja)
GB (1) GB2047896B (ja)
WO (1) WO1980001005A1 (ja)

Families Citing this family (115)

* Cited by examiner, † Cited by third party
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DE3034944C2 (de) * 1980-09-01 1985-01-17 Gerhard Dr. 8029 Sauerlach Busse Verfahren und Einrichtung zur photothermischen Struktur-Untersuchung fester Körper
DE3037983C2 (de) * 1980-10-08 1983-03-31 Fa. Carl Zeiss, 7920 Heidenheim Verfahren und Vorrichtung zur lichtinduzierten rastermikroskopischen Darstellung von Probenparametern in ihrer räumlichen Verteilung
US4430897A (en) * 1981-05-14 1984-02-14 The Board Of Trustees Of The Leland Stanford University Acoustic microscope and method
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US4484820A (en) * 1982-05-25 1984-11-27 Therma-Wave, Inc. Method for evaluating the quality of the bond between two members utilizing thermoacoustic microscopy
US4513384A (en) * 1982-06-18 1985-04-23 Therma-Wave, Inc. Thin film thickness measurements and depth profiling utilizing a thermal wave detection system
DE3224637C2 (de) * 1982-07-01 1984-12-06 Siemens AG, 1000 Berlin und 8000 München Opto-akustisches Licht-Raster-Mikroskop
US4521118A (en) * 1982-07-26 1985-06-04 Therma-Wave, Inc. Method for detection of thermal waves with a laser probe
US4522510A (en) * 1982-07-26 1985-06-11 Therma-Wave, Inc. Thin film thickness measurement with thermal waves
JPS59174751A (ja) * 1983-03-25 1984-10-03 Toshiba Corp セラミツクス製品の欠陥検査方法
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US4578584A (en) * 1984-01-23 1986-03-25 International Business Machines Corporation Thermal wave microscopy using areal infrared detection
SE455736B (sv) * 1984-03-15 1988-08-01 Sarastro Ab Forfaringssett och anordning for mikrofotometrering och efterfoljande bildsammanstellning
US4589783A (en) * 1984-04-04 1986-05-20 Wayne State University Thermal wave imaging apparatus
US4679946A (en) * 1984-05-21 1987-07-14 Therma-Wave, Inc. Evaluating both thickness and compositional variables in a thin film sample
US4579463A (en) * 1984-05-21 1986-04-01 Therma-Wave Partners Detecting thermal waves to evaluate thermal parameters
US4636088A (en) * 1984-05-21 1987-01-13 Therma-Wave, Inc. Method and apparatus for evaluating surface conditions of a sample
US4727420A (en) * 1984-10-16 1988-02-23 Fuji Photo Film Co., Ltd. Acoustooptic image formation
JPS61102541A (ja) * 1984-10-25 1986-05-21 Hitachi Ltd 液体中の不純物分析方法および装置
US4666308A (en) * 1984-10-30 1987-05-19 Stanford University Method and apparatus for non-destructive testing using acoustic-optic laser probe
US4632561A (en) * 1985-04-30 1986-12-30 Therma-Wave, Inc. Evaluation of surface and subsurface characteristics of a sample
US4622853A (en) * 1985-08-23 1986-11-18 Union Camp Corporation Laser induced acoustic generation for sonic modulus
US4806292A (en) * 1986-01-21 1989-02-21 Ford Aerospace & Communications Corporation System for stabilizing dimensional properties of cured composite structures
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US4781067A (en) * 1987-04-30 1988-11-01 Sonoscan, Inc. Balanced scanning mechanism
JPH0827264B2 (ja) * 1988-09-21 1996-03-21 工業技術院長 マルチ変調周波数による光音響撮像方法
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US5136172A (en) * 1989-08-16 1992-08-04 Hitachi, Ltd. Method and apparatus for detecting photoacoustic signal
US5125749A (en) * 1990-09-24 1992-06-30 The Dow Chemical Company Probe for photoacoustic analysis
US5170666A (en) * 1991-03-29 1992-12-15 Larsen Lawrence E Nondestructive evaluation of composite materials using acoustic emissions stimulated by absorbed microwave/radiofrequency energy
US5180226A (en) * 1991-10-30 1993-01-19 Texas Instruments Incorporated Method and apparatus for precise temperature measurement
US5286313A (en) * 1991-10-31 1994-02-15 Surface Combustion, Inc. Process control system using polarizing interferometer
US5257544A (en) * 1992-01-22 1993-11-02 The Board Of Trustees Of The Leland Stanford Junior University Resonant frequency method for bearing ball inspection
US5226730A (en) * 1992-05-27 1993-07-13 The Babcock & Wilcox Company Internal temperature monitor for work pieces
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US5923430A (en) * 1993-06-17 1999-07-13 Ultrapointe Corporation Method for characterizing defects on semiconductor wafers
US5604592A (en) * 1994-09-19 1997-02-18 Textron Defense Systems, Division Of Avco Corporation Laser ultrasonics-based material analysis system and method using matched filter processing
US5498873A (en) * 1994-11-15 1996-03-12 Tif Instruments, Inc. Refrigerant impurity analyzer
US6309352B1 (en) * 1996-01-31 2001-10-30 Board Of Regents, The University Of Texas System Real time optoacoustic monitoring of changes in tissue properties
US6405069B1 (en) 1996-01-31 2002-06-11 Board Of Regents, The University Of Texas System Time-resolved optoacoustic method and system for noninvasive monitoring of glucose
US5713356A (en) * 1996-10-04 1998-02-03 Optosonics, Inc. Photoacoustic breast scanner
US6148114A (en) * 1996-11-27 2000-11-14 Ultrapointe Corporation Ring dilation and erosion techniques for digital image processing
FR2752300A1 (fr) * 1996-12-24 1998-02-13 Commissariat Energie Atomique Procede et dispositif de caracterisation d'un milieu solide ou liquide
US6104942A (en) * 1998-05-12 2000-08-15 Optosonics, Inc. Thermoacoustic tissue scanner
US6054868A (en) * 1998-06-10 2000-04-25 Boxer Cross Incorporated Apparatus and method for measuring a property of a layer in a multilayered structure
US6885444B2 (en) * 1998-06-10 2005-04-26 Boxer Cross Inc Evaluating a multi-layered structure for voids
US6049220A (en) * 1998-06-10 2000-04-11 Boxer Cross Incorporated Apparatus and method for evaluating a wafer of semiconductor material
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US6323951B1 (en) * 1999-03-22 2001-11-27 Boxer Cross Incorporated Apparatus and method for determining the active dopant profile in a semiconductor wafer
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US6552792B1 (en) * 1999-10-13 2003-04-22 Southwest Sciences Incorporated Wavelength modulated photoacoustic spectrometer
JP2001244530A (ja) * 2000-02-28 2001-09-07 Inst Of Physical & Chemical Res 超短パルスレーザー発振装置
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AR024857A1 (es) * 2000-03-21 2002-10-30 Consejo Nac Invest Cient Tec Equipo laser para la medicion de suciedad de chapas de acero
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US6891627B1 (en) * 2000-09-20 2005-05-10 Kla-Tencor Technologies Corp. Methods and systems for determining a critical dimension and overlay of a specimen
US7285091B2 (en) * 2001-01-11 2007-10-23 The Johns Hopkins University Assessment of tooth structure using laser based ultrasonics
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US6911349B2 (en) * 2001-02-16 2005-06-28 Boxer Cross Inc. Evaluating sidewall coverage in a semiconductor wafer
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US6971791B2 (en) * 2002-03-01 2005-12-06 Boxer Cross, Inc Identifying defects in a conductive structure of a wafer, based on heat transfer therethrough
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WO2004096082A2 (en) * 2003-04-24 2004-11-11 The Board Of Regents Of The University Of Texas System Noninvasive blood analysis by optical probing of the veins under the tongue
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JP5677044B2 (ja) * 2010-11-19 2015-02-25 キヤノン株式会社 光音響測定装置及び方法
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US11137375B2 (en) 2013-11-19 2021-10-05 California Institute Of Technology Systems and methods of grueneisen-relaxation photoacoustic microscopy and photoacoustic wavefront shaping
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US11672426B2 (en) 2017-05-10 2023-06-13 California Institute Of Technology Snapshot photoacoustic photography using an ergodic relay
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US11530979B2 (en) 2018-08-14 2022-12-20 California Institute Of Technology Multifocal photoacoustic microscopy through an ergodic relay
EP3847453A4 (en) 2018-09-04 2022-06-22 California Institute of Technology PHOTOACOUSTIC INFRARED MICROSCOPY AND SPECTROSCOPY WITH INCREASED RESOLUTION
US11369280B2 (en) 2019-03-01 2022-06-28 California Institute Of Technology Velocity-matched ultrasonic tagging in photoacoustic flowgraphy
WO2021092250A1 (en) 2019-11-05 2021-05-14 California Institute Of Technology Spatiotemporal antialiasing in photoacoustic computed tomography

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* Cited by examiner, † Cited by third party
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US4091681A (en) * 1977-06-21 1978-05-30 The United States Of America As Represented By The Secretary Of The Air Force Method for the simultaneous determination of low optical bulk and surface absorption coefficients in solids

Also Published As

Publication number Publication date
WO1980001005A1 (en) 1980-05-15
DE2953286A1 (en) 1980-12-04
GB2047896A (en) 1980-12-03
JPS6239705B2 (ja) 1987-08-25
US4255971A (en) 1981-03-17
GB2047896B (en) 1983-01-26

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