JPS5550017B2 - - Google Patents

Info

Publication number
JPS5550017B2
JPS5550017B2 JP9058272A JP9058272A JPS5550017B2 JP S5550017 B2 JPS5550017 B2 JP S5550017B2 JP 9058272 A JP9058272 A JP 9058272A JP 9058272 A JP9058272 A JP 9058272A JP S5550017 B2 JPS5550017 B2 JP S5550017B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP9058272A
Other languages
Japanese (ja)
Other versions
JPS4945034A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9058272A priority Critical patent/JPS5550017B2/ja
Publication of JPS4945034A publication Critical patent/JPS4945034A/ja
Publication of JPS5550017B2 publication Critical patent/JPS5550017B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
JP9058272A 1972-09-08 1972-09-08 Expired JPS5550017B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9058272A JPS5550017B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1972-09-08 1972-09-08

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9058272A JPS5550017B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1972-09-08 1972-09-08

Publications (2)

Publication Number Publication Date
JPS4945034A JPS4945034A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1974-04-27
JPS5550017B2 true JPS5550017B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1980-12-16

Family

ID=14002421

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9058272A Expired JPS5550017B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1972-09-08 1972-09-08

Country Status (1)

Country Link
JP (1) JPS5550017B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5132620B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1973-05-07 1976-09-14
JPS5183482A (en) * 1975-01-18 1976-07-22 Nippon Telegraph & Telephone Tasohaisennokeiseihoho
JPS5831528A (ja) * 1981-08-19 1983-02-24 Nec Corp フオトレジストの除去方法
JP2590890B2 (ja) * 1987-07-03 1997-03-12 富士ゼロックス株式会社 クロームフォトリソエッチングプロセスにおけるレジスト除去方法

Also Published As

Publication number Publication date
JPS4945034A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1974-04-27

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