JPS5549183Y2 - - Google Patents
Info
- Publication number
- JPS5549183Y2 JPS5549183Y2 JP10405075U JP10405075U JPS5549183Y2 JP S5549183 Y2 JPS5549183 Y2 JP S5549183Y2 JP 10405075 U JP10405075 U JP 10405075U JP 10405075 U JP10405075 U JP 10405075U JP S5549183 Y2 JPS5549183 Y2 JP S5549183Y2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Workshop Equipment, Work Benches, Supports, Or Storage Means (AREA)
- Ventilation (AREA)
- Devices For Use In Laboratory Experiments (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10405075U JPS5549183Y2 (cs) | 1975-07-25 | 1975-07-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10405075U JPS5549183Y2 (cs) | 1975-07-25 | 1975-07-25 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5218665U JPS5218665U (cs) | 1977-02-09 |
| JPS5549183Y2 true JPS5549183Y2 (cs) | 1980-11-17 |
Family
ID=28585419
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10405075U Expired JPS5549183Y2 (cs) | 1975-07-25 | 1975-07-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5549183Y2 (cs) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6197555A (ja) * | 1984-10-19 | 1986-05-16 | Tokyo Optical Co Ltd | 表面検査装置 |
| JPS64738A (en) * | 1988-05-20 | 1989-01-05 | Hitachi Ltd | Heat treatment of semiconductor wafer |
-
1975
- 1975-07-25 JP JP10405075U patent/JPS5549183Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5218665U (cs) | 1977-02-09 |