JPS5548697B2 - - Google Patents
Info
- Publication number
- JPS5548697B2 JPS5548697B2 JP1258475A JP1258475A JPS5548697B2 JP S5548697 B2 JPS5548697 B2 JP S5548697B2 JP 1258475 A JP1258475 A JP 1258475A JP 1258475 A JP1258475 A JP 1258475A JP S5548697 B2 JPS5548697 B2 JP S5548697B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
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- Element Separation (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1258475A JPS5187979A (ja) | 1975-01-31 | 1975-01-31 | Bunryosankabutsuryoikiojusuru handotaisochinoseizohoho |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1258475A JPS5187979A (ja) | 1975-01-31 | 1975-01-31 | Bunryosankabutsuryoikiojusuru handotaisochinoseizohoho |
Related Child Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13518079A Division JPS5570043A (en) | 1979-10-22 | 1979-10-22 | Fabricating method of semiconductor device having isolating oxide region |
| JP13517979A Division JPS5570042A (en) | 1979-10-22 | 1979-10-22 | Fabricating method of semiconductor device having isolating oxide region |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5187979A JPS5187979A (ja) | 1976-07-31 |
| JPS5548697B2 true JPS5548697B2 (cs) | 1980-12-08 |
Family
ID=11809391
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1258475A Granted JPS5187979A (ja) | 1975-01-31 | 1975-01-31 | Bunryosankabutsuryoikiojusuru handotaisochinoseizohoho |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5187979A (cs) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5496979A (en) * | 1978-01-18 | 1979-07-31 | Hitachi Ltd | Manufacture of semiconductor integrated circuit device |
| JPS57207350A (en) * | 1981-06-16 | 1982-12-20 | Nec Corp | Manufacture of semiconductor device |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| NL7204741A (cs) * | 1972-04-08 | 1973-10-10 |
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1975
- 1975-01-31 JP JP1258475A patent/JPS5187979A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5187979A (ja) | 1976-07-31 |