JPS5548694B2 - - Google Patents
Info
- Publication number
- JPS5548694B2 JPS5548694B2 JP11796972A JP11796972A JPS5548694B2 JP S5548694 B2 JPS5548694 B2 JP S5548694B2 JP 11796972 A JP11796972 A JP 11796972A JP 11796972 A JP11796972 A JP 11796972A JP S5548694 B2 JPS5548694 B2 JP S5548694B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- ing And Chemical Polishing (AREA)
- Weting (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11796972A JPS5548694B2 (es) | 1972-11-27 | 1972-11-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11796972A JPS5548694B2 (es) | 1972-11-27 | 1972-11-27 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4976479A JPS4976479A (es) | 1974-07-23 |
| JPS5548694B2 true JPS5548694B2 (es) | 1980-12-08 |
Family
ID=14724744
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11796972A Expired JPS5548694B2 (es) | 1972-11-27 | 1972-11-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5548694B2 (es) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5302551B2 (ja) * | 2008-02-28 | 2013-10-02 | 林純薬工業株式会社 | シリコン異方性エッチング液組成物 |
-
1972
- 1972-11-27 JP JP11796972A patent/JPS5548694B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS4976479A (es) | 1974-07-23 |