JPS5548694B2 - - Google Patents

Info

Publication number
JPS5548694B2
JPS5548694B2 JP11796972A JP11796972A JPS5548694B2 JP S5548694 B2 JPS5548694 B2 JP S5548694B2 JP 11796972 A JP11796972 A JP 11796972A JP 11796972 A JP11796972 A JP 11796972A JP S5548694 B2 JPS5548694 B2 JP S5548694B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP11796972A
Other languages
Japanese (ja)
Other versions
JPS4976479A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP11796972A priority Critical patent/JPS5548694B2/ja
Publication of JPS4976479A publication Critical patent/JPS4976479A/ja
Publication of JPS5548694B2 publication Critical patent/JPS5548694B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Weting (AREA)
  • ing And Chemical Polishing (AREA)
JP11796972A 1972-11-27 1972-11-27 Expired JPS5548694B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11796972A JPS5548694B2 (en) 1972-11-27 1972-11-27

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11796972A JPS5548694B2 (en) 1972-11-27 1972-11-27

Publications (2)

Publication Number Publication Date
JPS4976479A JPS4976479A (en) 1974-07-23
JPS5548694B2 true JPS5548694B2 (en) 1980-12-08

Family

ID=14724744

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11796972A Expired JPS5548694B2 (en) 1972-11-27 1972-11-27

Country Status (1)

Country Link
JP (1) JPS5548694B2 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5302551B2 (en) * 2008-02-28 2013-10-02 林純薬工業株式会社 Silicon anisotropic etchant composition

Also Published As

Publication number Publication date
JPS4976479A (en) 1974-07-23

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