JPS4976479A - - Google Patents
Info
- Publication number
- JPS4976479A JPS4976479A JP47117969A JP11796972A JPS4976479A JP S4976479 A JPS4976479 A JP S4976479A JP 47117969 A JP47117969 A JP 47117969A JP 11796972 A JP11796972 A JP 11796972A JP S4976479 A JPS4976479 A JP S4976479A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- ing And Chemical Polishing (AREA)
- Weting (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11796972A JPS5548694B2 (en) | 1972-11-27 | 1972-11-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11796972A JPS5548694B2 (en) | 1972-11-27 | 1972-11-27 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4976479A true JPS4976479A (en) | 1974-07-23 |
| JPS5548694B2 JPS5548694B2 (en) | 1980-12-08 |
Family
ID=14724744
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11796972A Expired JPS5548694B2 (en) | 1972-11-27 | 1972-11-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5548694B2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009206335A (en) * | 2008-02-28 | 2009-09-10 | Hayashi Junyaku Kogyo Kk | Silicon anisotropic etching liquid composition |
-
1972
- 1972-11-27 JP JP11796972A patent/JPS5548694B2/ja not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009206335A (en) * | 2008-02-28 | 2009-09-10 | Hayashi Junyaku Kogyo Kk | Silicon anisotropic etching liquid composition |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5548694B2 (en) | 1980-12-08 |