JPS5547952B2 - - Google Patents
Info
- Publication number
- JPS5547952B2 JPS5547952B2 JP234572A JP234572A JPS5547952B2 JP S5547952 B2 JPS5547952 B2 JP S5547952B2 JP 234572 A JP234572 A JP 234572A JP 234572 A JP234572 A JP 234572A JP S5547952 B2 JPS5547952 B2 JP S5547952B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Cleaning In General (AREA)
- Cleaning By Liquid Or Steam (AREA)
- Drying Of Semiconductors (AREA)
- Cleaning Or Drying Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP234572A JPS5547952B2 (fr) | 1971-12-29 | 1971-12-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP234572A JPS5547952B2 (fr) | 1971-12-29 | 1971-12-29 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4872971A JPS4872971A (fr) | 1973-10-02 |
| JPS5547952B2 true JPS5547952B2 (fr) | 1980-12-03 |
Family
ID=11526681
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP234572A Expired JPS5547952B2 (fr) | 1971-12-29 | 1971-12-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5547952B2 (fr) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6355113B1 (en) | 1991-12-02 | 2002-03-12 | 3M Innovative Properties Company | Multiple solvent cleaning system |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4056642A (en) * | 1976-05-14 | 1977-11-01 | Data General Corporation | Method of fabricating metal-semiconductor interfaces |
| JPS5459081A (en) * | 1977-10-20 | 1979-05-12 | Toshiba Corp | Surface treatment method for semiconductor element |
| JP2599122B2 (ja) * | 1985-06-10 | 1997-04-09 | ソニー株式会社 | 半導体装置の製造方法 |
| WO2002047142A1 (fr) * | 2000-12-05 | 2002-06-13 | Tokyo Electron Limited | Procede et appareil de traitement d'un article a traiter |
-
1971
- 1971-12-29 JP JP234572A patent/JPS5547952B2/ja not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6355113B1 (en) | 1991-12-02 | 2002-03-12 | 3M Innovative Properties Company | Multiple solvent cleaning system |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS4872971A (fr) | 1973-10-02 |