JPS5547870Y2 - - Google Patents
Info
- Publication number
- JPS5547870Y2 JPS5547870Y2 JP8365476U JP8365476U JPS5547870Y2 JP S5547870 Y2 JPS5547870 Y2 JP S5547870Y2 JP 8365476 U JP8365476 U JP 8365476U JP 8365476 U JP8365476 U JP 8365476U JP S5547870 Y2 JPS5547870 Y2 JP S5547870Y2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Physical Vapour Deposition (AREA)
- Discharge Heating (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8365476U JPS5547870Y2 (en:Method) | 1976-06-25 | 1976-06-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8365476U JPS5547870Y2 (en:Method) | 1976-06-25 | 1976-06-25 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS532443U JPS532443U (en:Method) | 1978-01-11 |
| JPS5547870Y2 true JPS5547870Y2 (en:Method) | 1980-11-10 |
Family
ID=28565195
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8365476U Expired JPS5547870Y2 (en:Method) | 1976-06-25 | 1976-06-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5547870Y2 (en:Method) |
-
1976
- 1976-06-25 JP JP8365476U patent/JPS5547870Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS532443U (en:Method) | 1978-01-11 |