JPS532443U - - Google Patents

Info

Publication number
JPS532443U
JPS532443U JP8365476U JP8365476U JPS532443U JP S532443 U JPS532443 U JP S532443U JP 8365476 U JP8365476 U JP 8365476U JP 8365476 U JP8365476 U JP 8365476U JP S532443 U JPS532443 U JP S532443U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8365476U
Other languages
Japanese (ja)
Other versions
JPS5547870Y2 (en:Method
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP8365476U priority Critical patent/JPS5547870Y2/ja
Publication of JPS532443U publication Critical patent/JPS532443U/ja
Application granted granted Critical
Publication of JPS5547870Y2 publication Critical patent/JPS5547870Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Discharge Heating (AREA)
JP8365476U 1976-06-25 1976-06-25 Expired JPS5547870Y2 (en:Method)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8365476U JPS5547870Y2 (en:Method) 1976-06-25 1976-06-25

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8365476U JPS5547870Y2 (en:Method) 1976-06-25 1976-06-25

Publications (2)

Publication Number Publication Date
JPS532443U true JPS532443U (en:Method) 1978-01-11
JPS5547870Y2 JPS5547870Y2 (en:Method) 1980-11-10

Family

ID=28565195

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8365476U Expired JPS5547870Y2 (en:Method) 1976-06-25 1976-06-25

Country Status (1)

Country Link
JP (1) JPS5547870Y2 (en:Method)

Also Published As

Publication number Publication date
JPS5547870Y2 (en:Method) 1980-11-10

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