JPS5547803B2 - - Google Patents

Info

Publication number
JPS5547803B2
JPS5547803B2 JP10255475A JP10255475A JPS5547803B2 JP S5547803 B2 JPS5547803 B2 JP S5547803B2 JP 10255475 A JP10255475 A JP 10255475A JP 10255475 A JP10255475 A JP 10255475A JP S5547803 B2 JPS5547803 B2 JP S5547803B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP10255475A
Other languages
Japanese (ja)
Other versions
JPS5226882A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10255475A priority Critical patent/JPS5226882A/ja
Publication of JPS5226882A publication Critical patent/JPS5226882A/ja
Publication of JPS5547803B2 publication Critical patent/JPS5547803B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Measuring Temperature Or Quantity Of Heat (AREA)
JP10255475A 1975-08-26 1975-08-26 Apparatus for direct measurement of substrate temperatures Granted JPS5226882A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10255475A JPS5226882A (en) 1975-08-26 1975-08-26 Apparatus for direct measurement of substrate temperatures

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10255475A JPS5226882A (en) 1975-08-26 1975-08-26 Apparatus for direct measurement of substrate temperatures

Publications (2)

Publication Number Publication Date
JPS5226882A JPS5226882A (en) 1977-02-28
JPS5547803B2 true JPS5547803B2 (cg-RX-API-DMAC7.html) 1980-12-02

Family

ID=14330451

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10255475A Granted JPS5226882A (en) 1975-08-26 1975-08-26 Apparatus for direct measurement of substrate temperatures

Country Status (1)

Country Link
JP (1) JPS5226882A (cg-RX-API-DMAC7.html)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61294320A (ja) * 1985-06-24 1986-12-25 Sumitomo Electric Ind Ltd 基板温度測定方法および装置

Also Published As

Publication number Publication date
JPS5226882A (en) 1977-02-28

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