JPS5547803B2 - - Google Patents
Info
- Publication number
- JPS5547803B2 JPS5547803B2 JP10255475A JP10255475A JPS5547803B2 JP S5547803 B2 JPS5547803 B2 JP S5547803B2 JP 10255475 A JP10255475 A JP 10255475A JP 10255475 A JP10255475 A JP 10255475A JP S5547803 B2 JPS5547803 B2 JP S5547803B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Physical Vapour Deposition (AREA)
- Measuring Temperature Or Quantity Of Heat (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10255475A JPS5226882A (en) | 1975-08-26 | 1975-08-26 | Apparatus for direct measurement of substrate temperatures |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10255475A JPS5226882A (en) | 1975-08-26 | 1975-08-26 | Apparatus for direct measurement of substrate temperatures |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5226882A JPS5226882A (en) | 1977-02-28 |
| JPS5547803B2 true JPS5547803B2 (Sortimente) | 1980-12-02 |
Family
ID=14330451
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10255475A Granted JPS5226882A (en) | 1975-08-26 | 1975-08-26 | Apparatus for direct measurement of substrate temperatures |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5226882A (Sortimente) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61294320A (ja) * | 1985-06-24 | 1986-12-25 | Sumitomo Electric Ind Ltd | 基板温度測定方法および装置 |
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1975
- 1975-08-26 JP JP10255475A patent/JPS5226882A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5226882A (en) | 1977-02-28 |