JPS5547115B2 - - Google Patents
Info
- Publication number
- JPS5547115B2 JPS5547115B2 JP6197276A JP6197276A JPS5547115B2 JP S5547115 B2 JPS5547115 B2 JP S5547115B2 JP 6197276 A JP6197276 A JP 6197276A JP 6197276 A JP6197276 A JP 6197276A JP S5547115 B2 JPS5547115 B2 JP S5547115B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
- Electroplating Methods And Accessories (AREA)
- Electrodes Of Semiconductors (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6197276A JPS52144336A (en) | 1976-05-28 | 1976-05-28 | Plating amount controlling method and method of fabricating detecting electrode in said method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6197276A JPS52144336A (en) | 1976-05-28 | 1976-05-28 | Plating amount controlling method and method of fabricating detecting electrode in said method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS52144336A JPS52144336A (en) | 1977-12-01 |
| JPS5547115B2 true JPS5547115B2 (oth) | 1980-11-27 |
Family
ID=13186590
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6197276A Granted JPS52144336A (en) | 1976-05-28 | 1976-05-28 | Plating amount controlling method and method of fabricating detecting electrode in said method |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS52144336A (oth) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5683936A (en) * | 1979-12-13 | 1981-07-08 | Mitsubishi Electric Corp | Production of semiconductor device |
| DE3410875A1 (de) * | 1984-03-22 | 1985-10-03 | Schering AG, Berlin und Bergkamen, 1000 Berlin | Verfahren zur messung der stromdichte in galvanikbaedern |
| DE112016007417T5 (de) * | 2016-11-08 | 2019-07-25 | Mitsubishi Electric Corporation | Halbleitervorrichtung |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3374112A (en) * | 1964-03-05 | 1968-03-19 | Yeda Res & Dev | Method and apparatus for controlled deposition of a thin conductive layer |
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1976
- 1976-05-28 JP JP6197276A patent/JPS52144336A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS52144336A (en) | 1977-12-01 |