JPS5546056B2 - - Google Patents

Info

Publication number
JPS5546056B2
JPS5546056B2 JP8630672A JP8630672A JPS5546056B2 JP S5546056 B2 JPS5546056 B2 JP S5546056B2 JP 8630672 A JP8630672 A JP 8630672A JP 8630672 A JP8630672 A JP 8630672A JP S5546056 B2 JPS5546056 B2 JP S5546056B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP8630672A
Other languages
Japanese (ja)
Other versions
JPS4943579A (ref
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP8630672A priority Critical patent/JPS5546056B2/ja
Publication of JPS4943579A publication Critical patent/JPS4943579A/ja
Publication of JPS5546056B2 publication Critical patent/JPS5546056B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
JP8630672A 1972-08-30 1972-08-30 Expired JPS5546056B2 (ref)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8630672A JPS5546056B2 (ref) 1972-08-30 1972-08-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8630672A JPS5546056B2 (ref) 1972-08-30 1972-08-30

Publications (2)

Publication Number Publication Date
JPS4943579A JPS4943579A (ref) 1974-04-24
JPS5546056B2 true JPS5546056B2 (ref) 1980-11-21

Family

ID=13883137

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8630672A Expired JPS5546056B2 (ref) 1972-08-30 1972-08-30

Country Status (1)

Country Link
JP (1) JPS5546056B2 (ref)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05314540A (ja) * 1992-05-08 1993-11-26 Kuraray Co Ltd スパッタリング装置

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI802439B (zh) * 2017-10-27 2023-05-11 美商應用材料股份有限公司 具有空間分離的單個晶圓處理環境

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05314540A (ja) * 1992-05-08 1993-11-26 Kuraray Co Ltd スパッタリング装置

Also Published As

Publication number Publication date
JPS4943579A (ref) 1974-04-24

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