JPS5546056B2 - - Google Patents

Info

Publication number
JPS5546056B2
JPS5546056B2 JP8630672A JP8630672A JPS5546056B2 JP S5546056 B2 JPS5546056 B2 JP S5546056B2 JP 8630672 A JP8630672 A JP 8630672A JP 8630672 A JP8630672 A JP 8630672A JP S5546056 B2 JPS5546056 B2 JP S5546056B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP8630672A
Other languages
Japanese (ja)
Other versions
JPS4943579A (cg-RX-API-DMAC7.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP8630672A priority Critical patent/JPS5546056B2/ja
Publication of JPS4943579A publication Critical patent/JPS4943579A/ja
Publication of JPS5546056B2 publication Critical patent/JPS5546056B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
JP8630672A 1972-08-30 1972-08-30 Expired JPS5546056B2 (cg-RX-API-DMAC7.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8630672A JPS5546056B2 (cg-RX-API-DMAC7.html) 1972-08-30 1972-08-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8630672A JPS5546056B2 (cg-RX-API-DMAC7.html) 1972-08-30 1972-08-30

Publications (2)

Publication Number Publication Date
JPS4943579A JPS4943579A (cg-RX-API-DMAC7.html) 1974-04-24
JPS5546056B2 true JPS5546056B2 (cg-RX-API-DMAC7.html) 1980-11-21

Family

ID=13883137

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8630672A Expired JPS5546056B2 (cg-RX-API-DMAC7.html) 1972-08-30 1972-08-30

Country Status (1)

Country Link
JP (1) JPS5546056B2 (cg-RX-API-DMAC7.html)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05314540A (ja) * 1992-05-08 1993-11-26 Kuraray Co Ltd スパッタリング装置

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI729319B (zh) * 2017-10-27 2021-06-01 美商應用材料股份有限公司 具有空間分離的單個晶圓處理環境

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05314540A (ja) * 1992-05-08 1993-11-26 Kuraray Co Ltd スパッタリング装置

Also Published As

Publication number Publication date
JPS4943579A (cg-RX-API-DMAC7.html) 1974-04-24

Similar Documents

Publication Publication Date Title
JPS4965945A (cg-RX-API-DMAC7.html)
CS156922B1 (cg-RX-API-DMAC7.html)
JPS4943579A (cg-RX-API-DMAC7.html)
JPS4913134U (cg-RX-API-DMAC7.html)
JPS528274Y2 (cg-RX-API-DMAC7.html)
CS154024B1 (cg-RX-API-DMAC7.html)
CS156971B1 (cg-RX-API-DMAC7.html)
CS156987B1 (cg-RX-API-DMAC7.html)
CS159803B1 (cg-RX-API-DMAC7.html)
CS154090B1 (cg-RX-API-DMAC7.html)
CS159448B1 (cg-RX-API-DMAC7.html)
CH575946A5 (cg-RX-API-DMAC7.html)
CH590333A5 (cg-RX-API-DMAC7.html)
CH566258A5 (cg-RX-API-DMAC7.html)
CH571105B5 (cg-RX-API-DMAC7.html)
CH588722A5 (cg-RX-API-DMAC7.html)
CH592161A5 (cg-RX-API-DMAC7.html)
LU68190A1 (cg-RX-API-DMAC7.html)
CH575128A5 (cg-RX-API-DMAC7.html)
CH571031A5 (cg-RX-API-DMAC7.html)
CH566534A5 (cg-RX-API-DMAC7.html)
CH568085A5 (cg-RX-API-DMAC7.html)
CH576991A5 (cg-RX-API-DMAC7.html)
AU480295A (cg-RX-API-DMAC7.html)
CH594598A5 (cg-RX-API-DMAC7.html)