JPS5546054B2 - - Google Patents

Info

Publication number
JPS5546054B2
JPS5546054B2 JP3962572A JP3962572A JPS5546054B2 JP S5546054 B2 JPS5546054 B2 JP S5546054B2 JP 3962572 A JP3962572 A JP 3962572A JP 3962572 A JP3962572 A JP 3962572A JP S5546054 B2 JPS5546054 B2 JP S5546054B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP3962572A
Other languages
Japanese (ja)
Other versions
JPS493575A (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3962572A priority Critical patent/JPS5546054B2/ja
Publication of JPS493575A publication Critical patent/JPS493575A/ja
Publication of JPS5546054B2 publication Critical patent/JPS5546054B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • ing And Chemical Polishing (AREA)
  • Weting (AREA)
  • Cleaning In General (AREA)
  • Cleaning By Liquid Or Steam (AREA)
JP3962572A 1972-04-21 1972-04-21 Expired JPS5546054B2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3962572A JPS5546054B2 (enrdf_load_stackoverflow) 1972-04-21 1972-04-21

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3962572A JPS5546054B2 (enrdf_load_stackoverflow) 1972-04-21 1972-04-21

Related Child Applications (2)

Application Number Title Priority Date Filing Date
JP4463480A Division JPS55150233A (en) 1980-04-07 1980-04-07 Apparatus for treating semiconductor wafer
JP4463380A Division JPS55150232A (en) 1980-04-07 1980-04-07 Treating method of semiconductor wafer

Publications (2)

Publication Number Publication Date
JPS493575A JPS493575A (enrdf_load_stackoverflow) 1974-01-12
JPS5546054B2 true JPS5546054B2 (enrdf_load_stackoverflow) 1980-11-21

Family

ID=12558275

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3962572A Expired JPS5546054B2 (enrdf_load_stackoverflow) 1972-04-21 1972-04-21

Country Status (1)

Country Link
JP (1) JPS5546054B2 (enrdf_load_stackoverflow)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS515959A (en) * 1974-07-03 1976-01-19 Suwa Seikosha Kk Handotaisochino seizohoho
JPS52110823U (enrdf_load_stackoverflow) * 1976-02-20 1977-08-23
JPS5456371A (en) * 1977-10-14 1979-05-07 Hitachi Ltd Etching device
JPS56120131A (en) * 1980-02-27 1981-09-21 Hitachi Ltd Surface processing method and its device

Also Published As

Publication number Publication date
JPS493575A (enrdf_load_stackoverflow) 1974-01-12

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