JPS5546054B2 - - Google Patents
Info
- Publication number
- JPS5546054B2 JPS5546054B2 JP3962572A JP3962572A JPS5546054B2 JP S5546054 B2 JPS5546054 B2 JP S5546054B2 JP 3962572 A JP3962572 A JP 3962572A JP 3962572 A JP3962572 A JP 3962572A JP S5546054 B2 JPS5546054 B2 JP S5546054B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Cleaning In General (AREA)
- Cleaning By Liquid Or Steam (AREA)
- ing And Chemical Polishing (AREA)
- Weting (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3962572A JPS5546054B2 (cs) | 1972-04-21 | 1972-04-21 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3962572A JPS5546054B2 (cs) | 1972-04-21 | 1972-04-21 |
Related Child Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4463480A Division JPS55150233A (en) | 1980-04-07 | 1980-04-07 | Apparatus for treating semiconductor wafer |
| JP4463380A Division JPS55150232A (en) | 1980-04-07 | 1980-04-07 | Treating method of semiconductor wafer |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS493575A JPS493575A (cs) | 1974-01-12 |
| JPS5546054B2 true JPS5546054B2 (cs) | 1980-11-21 |
Family
ID=12558275
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3962572A Expired JPS5546054B2 (cs) | 1972-04-21 | 1972-04-21 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5546054B2 (cs) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS515959A (en) * | 1974-07-03 | 1976-01-19 | Suwa Seikosha Kk | Handotaisochino seizohoho |
| JPS52110823U (cs) * | 1976-02-20 | 1977-08-23 | ||
| JPS5456371A (en) * | 1977-10-14 | 1979-05-07 | Hitachi Ltd | Etching device |
| JPS56120131A (en) * | 1980-02-27 | 1981-09-21 | Hitachi Ltd | Surface processing method and its device |
-
1972
- 1972-04-21 JP JP3962572A patent/JPS5546054B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS493575A (cs) | 1974-01-12 |