JPS5545390Y2 - - Google Patents

Info

Publication number
JPS5545390Y2
JPS5545390Y2 JP6864875U JP6864875U JPS5545390Y2 JP S5545390 Y2 JPS5545390 Y2 JP S5545390Y2 JP 6864875 U JP6864875 U JP 6864875U JP 6864875 U JP6864875 U JP 6864875U JP S5545390 Y2 JPS5545390 Y2 JP S5545390Y2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP6864875U
Other languages
Japanese (ja)
Other versions
JPS51148954U (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6864875U priority Critical patent/JPS5545390Y2/ja
Publication of JPS51148954U publication Critical patent/JPS51148954U/ja
Application granted granted Critical
Publication of JPS5545390Y2 publication Critical patent/JPS5545390Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Exposure Or Original Feeding In Electrophotography (AREA)
  • Light Sources And Details Of Projection-Printing Devices (AREA)
JP6864875U 1975-05-21 1975-05-21 Expired JPS5545390Y2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6864875U JPS5545390Y2 (en) 1975-05-21 1975-05-21

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6864875U JPS5545390Y2 (en) 1975-05-21 1975-05-21

Publications (2)

Publication Number Publication Date
JPS51148954U JPS51148954U (en) 1976-11-29
JPS5545390Y2 true JPS5545390Y2 (en) 1980-10-24

Family

ID=28536506

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6864875U Expired JPS5545390Y2 (en) 1975-05-21 1975-05-21

Country Status (1)

Country Link
JP (1) JPS5545390Y2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62269826A (en) * 1986-05-15 1987-11-24 Matsushita Electronics Corp Float attracting method for semiconductor wafer

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62269826A (en) * 1986-05-15 1987-11-24 Matsushita Electronics Corp Float attracting method for semiconductor wafer

Also Published As

Publication number Publication date
JPS51148954U (en) 1976-11-29

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