JPS5545390Y2 - - Google Patents
Info
- Publication number
- JPS5545390Y2 JPS5545390Y2 JP6864875U JP6864875U JPS5545390Y2 JP S5545390 Y2 JPS5545390 Y2 JP S5545390Y2 JP 6864875 U JP6864875 U JP 6864875U JP 6864875 U JP6864875 U JP 6864875U JP S5545390 Y2 JPS5545390 Y2 JP S5545390Y2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Exposure Or Original Feeding In Electrophotography (AREA)
- Light Sources And Details Of Projection-Printing Devices (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6864875U JPS5545390Y2 (en) | 1975-05-21 | 1975-05-21 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6864875U JPS5545390Y2 (en) | 1975-05-21 | 1975-05-21 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS51148954U JPS51148954U (en) | 1976-11-29 |
JPS5545390Y2 true JPS5545390Y2 (en) | 1980-10-24 |
Family
ID=28536506
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP6864875U Expired JPS5545390Y2 (en) | 1975-05-21 | 1975-05-21 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5545390Y2 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62269826A (en) * | 1986-05-15 | 1987-11-24 | Matsushita Electronics Corp | Float attracting method for semiconductor wafer |
-
1975
- 1975-05-21 JP JP6864875U patent/JPS5545390Y2/ja not_active Expired
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62269826A (en) * | 1986-05-15 | 1987-11-24 | Matsushita Electronics Corp | Float attracting method for semiconductor wafer |
Also Published As
Publication number | Publication date |
---|---|
JPS51148954U (en) | 1976-11-29 |