JPS5545369Y2 - - Google Patents

Info

Publication number
JPS5545369Y2
JPS5545369Y2 JP1976160340U JP16034076U JPS5545369Y2 JP S5545369 Y2 JPS5545369 Y2 JP S5545369Y2 JP 1976160340 U JP1976160340 U JP 1976160340U JP 16034076 U JP16034076 U JP 16034076U JP S5545369 Y2 JPS5545369 Y2 JP S5545369Y2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1976160340U
Other languages
Japanese (ja)
Other versions
JPS5376941U (https=
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1976160340U priority Critical patent/JPS5545369Y2/ja
Publication of JPS5376941U publication Critical patent/JPS5376941U/ja
Application granted granted Critical
Publication of JPS5545369Y2 publication Critical patent/JPS5545369Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Sampling And Sample Adjustment (AREA)
  • Microscoopes, Condenser (AREA)
  • Warehouses Or Storage Devices (AREA)
JP1976160340U 1976-11-30 1976-11-30 Expired JPS5545369Y2 (https=)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1976160340U JPS5545369Y2 (https=) 1976-11-30 1976-11-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1976160340U JPS5545369Y2 (https=) 1976-11-30 1976-11-30

Publications (2)

Publication Number Publication Date
JPS5376941U JPS5376941U (https=) 1978-06-27
JPS5545369Y2 true JPS5545369Y2 (https=) 1980-10-24

Family

ID=28768228

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1976160340U Expired JPS5545369Y2 (https=) 1976-11-30 1976-11-30

Country Status (1)

Country Link
JP (1) JPS5545369Y2 (https=)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3902615A (en) * 1973-03-12 1975-09-02 Computervision Corp Automatic wafer loading and pre-alignment system

Also Published As

Publication number Publication date
JPS5376941U (https=) 1978-06-27

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