JPS5376941U - - Google Patents
Info
- Publication number
- JPS5376941U JPS5376941U JP16034076U JP16034076U JPS5376941U JP S5376941 U JPS5376941 U JP S5376941U JP 16034076 U JP16034076 U JP 16034076U JP 16034076 U JP16034076 U JP 16034076U JP S5376941 U JPS5376941 U JP S5376941U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Sampling And Sample Adjustment (AREA)
- Microscoopes, Condenser (AREA)
- Warehouses Or Storage Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1976160340U JPS5545369Y2 (https=) | 1976-11-30 | 1976-11-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1976160340U JPS5545369Y2 (https=) | 1976-11-30 | 1976-11-30 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5376941U true JPS5376941U (https=) | 1978-06-27 |
| JPS5545369Y2 JPS5545369Y2 (https=) | 1980-10-24 |
Family
ID=28768228
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1976160340U Expired JPS5545369Y2 (https=) | 1976-11-30 | 1976-11-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5545369Y2 (https=) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3902615A (en) * | 1973-03-12 | 1975-09-02 | Computervision Corp | Automatic wafer loading and pre-alignment system |
-
1976
- 1976-11-30 JP JP1976160340U patent/JPS5545369Y2/ja not_active Expired
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3902615A (en) * | 1973-03-12 | 1975-09-02 | Computervision Corp | Automatic wafer loading and pre-alignment system |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5545369Y2 (https=) | 1980-10-24 |