JPS5545247B2 - - Google Patents
Info
- Publication number
- JPS5545247B2 JPS5545247B2 JP7653271A JP7653271A JPS5545247B2 JP S5545247 B2 JPS5545247 B2 JP S5545247B2 JP 7653271 A JP7653271 A JP 7653271A JP 7653271 A JP7653271 A JP 7653271A JP S5545247 B2 JPS5545247 B2 JP S5545247B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Treating Waste Gases (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7653271A JPS5545247B2 (en) | 1971-09-30 | 1971-09-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7653271A JPS5545247B2 (en) | 1971-09-30 | 1971-09-30 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4840673A JPS4840673A (en) | 1973-06-14 |
| JPS5545247B2 true JPS5545247B2 (en) | 1980-11-17 |
Family
ID=13607876
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7653271A Expired JPS5545247B2 (en) | 1971-09-30 | 1971-09-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5545247B2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5883153U (en) * | 1981-11-30 | 1983-06-06 | 日本電気ホームエレクトロニクス株式会社 | Wafer inspection equipment |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5160676A (en) * | 1974-11-25 | 1976-05-26 | Konishiroku Photo Ind | CHITSUSOSANKABUTSUNO TEIGENHOHO |
| JPS51111471A (en) * | 1975-03-24 | 1976-10-01 | Fmc Corp | Method and apparatus for purifying nitrogen dioxide |
| JP2008100193A (en) * | 2006-10-20 | 2008-05-01 | Dowa Electronics Materials Co Ltd | Method of treating nitrogen oxide-containing gas and apparatus for treating nitrogen oxide-containing gas |
-
1971
- 1971-09-30 JP JP7653271A patent/JPS5545247B2/ja not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5883153U (en) * | 1981-11-30 | 1983-06-06 | 日本電気ホームエレクトロニクス株式会社 | Wafer inspection equipment |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS4840673A (en) | 1973-06-14 |