JPS5544249A - Oscillator driving piezoelectric thin film - Google Patents

Oscillator driving piezoelectric thin film

Info

Publication number
JPS5544249A
JPS5544249A JP11713078A JP11713078A JPS5544249A JP S5544249 A JPS5544249 A JP S5544249A JP 11713078 A JP11713078 A JP 11713078A JP 11713078 A JP11713078 A JP 11713078A JP S5544249 A JPS5544249 A JP S5544249A
Authority
JP
Japan
Prior art keywords
thin film
piezoelectric thin
substrate
oscillator
diapason
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11713078A
Other languages
Japanese (ja)
Inventor
Hiroshi Onuki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Instruments Inc
Original Assignee
Seiko Instruments Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Instruments Inc filed Critical Seiko Instruments Inc
Priority to JP11713078A priority Critical patent/JPS5544249A/en
Publication of JPS5544249A publication Critical patent/JPS5544249A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/21—Crystal tuning forks

Landscapes

  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)

Abstract

PURPOSE:To realize the industrialization and small sizing of the oscillator excellent in efficiency and performance without tightness for the perpendicularity between the substrate surface and the C axis, by using the construction implanting the piezoelectric thin film in the groove provided on the substrate. CONSTITUTION:The diapason oscillator takes the construction that the piezoelectric thin film 2 is implanted in the groove placed on the side surface of the substrate 1, and efficient oscillation can be made independently of the directivity of the axis C of the thin film, since the substrate 1 being one electrode to drive the thin film surrounds the piezoelectric thin film 2. In this oscillator, the groove 9 is formed on the elastic metal square rod 10, piezoelectric thin film 2 is formed with sputtering, and the diapason section 11 is formed with photo etching, and respective diapason oscillators can be obtained with splitting it with wire saw.
JP11713078A 1978-09-22 1978-09-22 Oscillator driving piezoelectric thin film Pending JPS5544249A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11713078A JPS5544249A (en) 1978-09-22 1978-09-22 Oscillator driving piezoelectric thin film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11713078A JPS5544249A (en) 1978-09-22 1978-09-22 Oscillator driving piezoelectric thin film

Publications (1)

Publication Number Publication Date
JPS5544249A true JPS5544249A (en) 1980-03-28

Family

ID=14704175

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11713078A Pending JPS5544249A (en) 1978-09-22 1978-09-22 Oscillator driving piezoelectric thin film

Country Status (1)

Country Link
JP (1) JPS5544249A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4982084A (en) * 1986-11-27 1991-01-01 Fanuc Limited Method for attaching pulse encoder to motor and motor attached with same

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4982084A (en) * 1986-11-27 1991-01-01 Fanuc Limited Method for attaching pulse encoder to motor and motor attached with same

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