JPS5541537B2 - - Google Patents

Info

Publication number
JPS5541537B2
JPS5541537B2 JP3197676A JP3197676A JPS5541537B2 JP S5541537 B2 JPS5541537 B2 JP S5541537B2 JP 3197676 A JP3197676 A JP 3197676A JP 3197676 A JP3197676 A JP 3197676A JP S5541537 B2 JPS5541537 B2 JP S5541537B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP3197676A
Other languages
Japanese (ja)
Other versions
JPS52115667A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3197676A priority Critical patent/JPS52115667A/ja
Publication of JPS52115667A publication Critical patent/JPS52115667A/ja
Publication of JPS5541537B2 publication Critical patent/JPS5541537B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Non-Volatile Memory (AREA)
JP3197676A 1976-03-25 1976-03-25 Semiconductor device Granted JPS52115667A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3197676A JPS52115667A (en) 1976-03-25 1976-03-25 Semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3197676A JPS52115667A (en) 1976-03-25 1976-03-25 Semiconductor device

Publications (2)

Publication Number Publication Date
JPS52115667A JPS52115667A (en) 1977-09-28
JPS5541537B2 true JPS5541537B2 (en US4325121.pdf) 1980-10-24

Family

ID=12345968

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3197676A Granted JPS52115667A (en) 1976-03-25 1976-03-25 Semiconductor device

Country Status (1)

Country Link
JP (1) JPS52115667A (en US4325121.pdf)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006156867A (ja) 2004-12-01 2006-06-15 Seiko Epson Corp 半導体基板の製造方法および半導体装置の製造方法

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5931226B2 (ja) * 1974-04-22 1984-07-31 日本電気株式会社 半導体装置

Also Published As

Publication number Publication date
JPS52115667A (en) 1977-09-28

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