JPS5541306Y2 - - Google Patents
Info
- Publication number
- JPS5541306Y2 JPS5541306Y2 JP1977034285U JP3428577U JPS5541306Y2 JP S5541306 Y2 JPS5541306 Y2 JP S5541306Y2 JP 1977034285 U JP1977034285 U JP 1977034285U JP 3428577 U JP3428577 U JP 3428577U JP S5541306 Y2 JPS5541306 Y2 JP S5541306Y2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Measuring Volume Flow (AREA)
- Accessories For Mixers (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1977034285U JPS5541306Y2 (enExample) | 1977-03-23 | 1977-03-23 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1977034285U JPS5541306Y2 (enExample) | 1977-03-23 | 1977-03-23 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS53130570U JPS53130570U (enExample) | 1978-10-17 |
| JPS5541306Y2 true JPS5541306Y2 (enExample) | 1980-09-27 |
Family
ID=28891367
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1977034285U Expired JPS5541306Y2 (enExample) | 1977-03-23 | 1977-03-23 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5541306Y2 (enExample) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6211877B2 (ja) * | 2013-10-03 | 2017-10-11 | 東京エレクトロン株式会社 | 基板処理システム |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5220331Y2 (enExample) * | 1972-07-26 | 1977-05-11 |
-
1977
- 1977-03-23 JP JP1977034285U patent/JPS5541306Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS53130570U (enExample) | 1978-10-17 |