JPS53130570U - - Google Patents
Info
- Publication number
- JPS53130570U JPS53130570U JP3428577U JP3428577U JPS53130570U JP S53130570 U JPS53130570 U JP S53130570U JP 3428577 U JP3428577 U JP 3428577U JP 3428577 U JP3428577 U JP 3428577U JP S53130570 U JPS53130570 U JP S53130570U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Measuring Volume Flow (AREA)
- Accessories For Mixers (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1977034285U JPS5541306Y2 (enExample) | 1977-03-23 | 1977-03-23 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1977034285U JPS5541306Y2 (enExample) | 1977-03-23 | 1977-03-23 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS53130570U true JPS53130570U (enExample) | 1978-10-17 |
| JPS5541306Y2 JPS5541306Y2 (enExample) | 1980-09-27 |
Family
ID=28891367
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1977034285U Expired JPS5541306Y2 (enExample) | 1977-03-23 | 1977-03-23 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5541306Y2 (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2015071147A (ja) * | 2013-10-03 | 2015-04-16 | 東京エレクトロン株式会社 | 基板処理システム |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4945012U (enExample) * | 1972-07-26 | 1974-04-20 |
-
1977
- 1977-03-23 JP JP1977034285U patent/JPS5541306Y2/ja not_active Expired
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4945012U (enExample) * | 1972-07-26 | 1974-04-20 |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2015071147A (ja) * | 2013-10-03 | 2015-04-16 | 東京エレクトロン株式会社 | 基板処理システム |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5541306Y2 (enExample) | 1980-09-27 |