JPS5540846B2 - - Google Patents
Info
- Publication number
- JPS5540846B2 JPS5540846B2 JP15128375A JP15128375A JPS5540846B2 JP S5540846 B2 JPS5540846 B2 JP S5540846B2 JP 15128375 A JP15128375 A JP 15128375A JP 15128375 A JP15128375 A JP 15128375A JP S5540846 B2 JPS5540846 B2 JP S5540846B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/18—Diffraction gratings
- G02B5/1847—Manufacturing methods
- G02B5/1857—Manufacturing methods using exposure or etching means, e.g. holography, photolithography, exposure to electron or ion beams
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Diffracting Gratings Or Hologram Optical Elements (AREA)
- Spectrometry And Color Measurement (AREA)
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP50151283A JPS5275341A (en) | 1975-12-19 | 1975-12-19 | Method of producing echelette grating |
| US05/750,914 US4131506A (en) | 1975-12-19 | 1976-12-15 | Method of producing echelette gratings |
| DE2657090A DE2657090C3 (de) | 1975-12-19 | 1976-12-16 | Verfahren zur Herstellung von Echelettgittern |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP50151283A JPS5275341A (en) | 1975-12-19 | 1975-12-19 | Method of producing echelette grating |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5275341A JPS5275341A (en) | 1977-06-24 |
| JPS5540846B2 true JPS5540846B2 (US07902200-20110308-C00004.png) | 1980-10-21 |
Family
ID=15515284
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP50151283A Granted JPS5275341A (en) | 1975-12-19 | 1975-12-19 | Method of producing echelette grating |
Country Status (3)
| Country | Link |
|---|---|
| US (1) | US4131506A (US07902200-20110308-C00004.png) |
| JP (1) | JPS5275341A (US07902200-20110308-C00004.png) |
| DE (1) | DE2657090C3 (US07902200-20110308-C00004.png) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1985002254A1 (en) * | 1983-11-21 | 1985-05-23 | Hitachi, Ltd. | Monochromator |
Families Citing this family (18)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5424653A (en) * | 1977-07-27 | 1979-02-24 | Rikagaku Kenkyusho | Substrate for echelette grating and method of manufacturing same |
| DE2818103A1 (de) * | 1978-04-25 | 1979-11-08 | Siemens Ag | Verfahren zur herstellung von aus einer vielzahl von auf einer glastraegerplatte angeordneten parallel zueinander ausgerichteten elektrisch leitenden streifen bestehenden polarisatoren |
| US4225380A (en) * | 1978-09-05 | 1980-09-30 | Wickens Justin H | Method of producing light emitting semiconductor display |
| US4309267A (en) * | 1980-07-21 | 1982-01-05 | Bell Telephone Laboratories, Incorporated | Reactive sputter etching apparatus |
| US4359373A (en) * | 1981-06-15 | 1982-11-16 | Rca Corporation | Method of formation of a blazed grating |
| US4419203A (en) * | 1982-03-05 | 1983-12-06 | International Business Machines Corporation | Apparatus and method for neutralizing ion beams |
| DE3528947A1 (de) * | 1985-08-13 | 1987-02-26 | Zeiss Carl Fa | Reflexionsbeugungsgitter mit hohem wirkungsgrad |
| DE3615361C2 (de) * | 1986-05-06 | 1994-09-01 | Santos Pereira Ribeiro Car Dos | Vorrichtung zur Oberflächenbehandlung von Werkstücken |
| JP2886649B2 (ja) * | 1990-09-27 | 1999-04-26 | 株式会社日立製作所 | イオンビーム加工方法及びその装置 |
| SG49673A1 (en) * | 1991-03-22 | 1998-06-15 | Shimadzu Corp | Dry etching method and its application |
| US5316640A (en) * | 1991-06-19 | 1994-05-31 | Matsushita Electric Industrial Co., Ltd. | Fabricating method of micro lens |
| JPH0677181A (ja) * | 1992-08-26 | 1994-03-18 | Matsushita Electric Ind Co Ltd | 化合物半導体の微細構造形成方法 |
| US5417799A (en) * | 1993-09-20 | 1995-05-23 | Hughes Aircraft Company | Reactive ion etching of gratings and cross gratings structures |
| JP3029524B2 (ja) * | 1993-10-06 | 2000-04-04 | シャープ株式会社 | 回折格子の製造方法 |
| FR2791781B1 (fr) * | 1999-03-30 | 2002-05-31 | Instruments Sa | Filtre polarisant et son procede de fabrication |
| GB0018629D0 (en) * | 2000-07-29 | 2000-09-13 | Secr Defence | Process for making a periodic profile |
| JP4349104B2 (ja) * | 2003-11-27 | 2009-10-21 | 株式会社島津製作所 | ブレーズド・ホログラフィック・グレーティング、その製造方法、及びレプリカグレーティング |
| RU2578018C1 (ru) * | 2015-01-12 | 2016-03-20 | Открытое акционерное общество "Научно-производственное объединение "Государственный институт прикладной оптики" (ОАО "НПО ГИПО") | Способ изготовления решёток-поляризаторов |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4982352A (US07902200-20110308-C00004.png) * | 1972-12-11 | 1974-08-08 |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3860783A (en) * | 1970-10-19 | 1975-01-14 | Bell Telephone Labor Inc | Ion etching through a pattern mask |
| US3733258A (en) * | 1971-02-03 | 1973-05-15 | Rca Corp | Sputter-etching technique for recording holograms or other fine-detail relief patterns in hard durable materials |
| JPS5738897B2 (US07902200-20110308-C00004.png) * | 1974-11-19 | 1982-08-18 | ||
| US4016062A (en) * | 1975-09-11 | 1977-04-05 | International Business Machines Corporation | Method of forming a serrated surface topography |
-
1975
- 1975-12-19 JP JP50151283A patent/JPS5275341A/ja active Granted
-
1976
- 1976-12-15 US US05/750,914 patent/US4131506A/en not_active Expired - Lifetime
- 1976-12-16 DE DE2657090A patent/DE2657090C3/de not_active Expired
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4982352A (US07902200-20110308-C00004.png) * | 1972-12-11 | 1974-08-08 |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1985002254A1 (en) * | 1983-11-21 | 1985-05-23 | Hitachi, Ltd. | Monochromator |
Also Published As
| Publication number | Publication date |
|---|---|
| US4131506A (en) | 1978-12-26 |
| DE2657090C3 (de) | 1979-04-19 |
| JPS5275341A (en) | 1977-06-24 |
| DE2657090B2 (de) | 1978-08-17 |
| DE2657090A1 (de) | 1977-06-30 |
