JPS5540208Y2 - - Google Patents
Info
- Publication number
- JPS5540208Y2 JPS5540208Y2 JP751675U JP751675U JPS5540208Y2 JP S5540208 Y2 JPS5540208 Y2 JP S5540208Y2 JP 751675 U JP751675 U JP 751675U JP 751675 U JP751675 U JP 751675U JP S5540208 Y2 JPS5540208 Y2 JP S5540208Y2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Thin Magnetic Films (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP751675U JPS5540208Y2 (https=) | 1975-01-14 | 1975-01-14 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP751675U JPS5540208Y2 (https=) | 1975-01-14 | 1975-01-14 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5189299U JPS5189299U (https=) | 1976-07-16 |
| JPS5540208Y2 true JPS5540208Y2 (https=) | 1980-09-19 |
Family
ID=28073839
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP751675U Expired JPS5540208Y2 (https=) | 1975-01-14 | 1975-01-14 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5540208Y2 (https=) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6072240A (ja) * | 1983-09-28 | 1985-04-24 | Toshiba Ceramics Co Ltd | ウエ−ハ保持具 |
-
1975
- 1975-01-14 JP JP751675U patent/JPS5540208Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5189299U (https=) | 1976-07-16 |