JPS5540174B2 - - Google Patents
Info
- Publication number
- JPS5540174B2 JPS5540174B2 JP8653575A JP8653575A JPS5540174B2 JP S5540174 B2 JPS5540174 B2 JP S5540174B2 JP 8653575 A JP8653575 A JP 8653575A JP 8653575 A JP8653575 A JP 8653575A JP S5540174 B2 JPS5540174 B2 JP S5540174B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8653575A JPS5210072A (en) | 1975-07-14 | 1975-07-14 | Method for growing epitaxial crystal |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8653575A JPS5210072A (en) | 1975-07-14 | 1975-07-14 | Method for growing epitaxial crystal |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5210072A JPS5210072A (en) | 1977-01-26 |
| JPS5540174B2 true JPS5540174B2 (en) | 1980-10-16 |
Family
ID=13889684
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8653575A Granted JPS5210072A (en) | 1975-07-14 | 1975-07-14 | Method for growing epitaxial crystal |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5210072A (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57196794A (en) * | 1981-05-29 | 1982-12-02 | Nec Corp | Epitaxial growth method |
| JP2947818B2 (en) * | 1988-07-27 | 1999-09-13 | 株式会社日立製作所 | Method of filling in fine hole with metal and cvd device for executing same |
-
1975
- 1975-07-14 JP JP8653575A patent/JPS5210072A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5210072A (en) | 1977-01-26 |