JPS5540110B2 - - Google Patents
Info
- Publication number
- JPS5540110B2 JPS5540110B2 JP15486275A JP15486275A JPS5540110B2 JP S5540110 B2 JPS5540110 B2 JP S5540110B2 JP 15486275 A JP15486275 A JP 15486275A JP 15486275 A JP15486275 A JP 15486275A JP S5540110 B2 JPS5540110 B2 JP S5540110B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15486275A JPS5278776A (en) | 1975-12-26 | 1975-12-26 | Apparatus for high frequency ionic plating |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15486275A JPS5278776A (en) | 1975-12-26 | 1975-12-26 | Apparatus for high frequency ionic plating |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5278776A JPS5278776A (en) | 1977-07-02 |
| JPS5540110B2 true JPS5540110B2 (show.php) | 1980-10-15 |
Family
ID=15593530
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15486275A Granted JPS5278776A (en) | 1975-12-26 | 1975-12-26 | Apparatus for high frequency ionic plating |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5278776A (show.php) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS56169770A (en) * | 1980-05-30 | 1981-12-26 | Asahi Glass Co Ltd | Ionic plating device |
| JPS58133372A (ja) * | 1982-02-03 | 1983-08-09 | Hitachi Condenser Co Ltd | イオンプレ−テイング装置 |
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1975
- 1975-12-26 JP JP15486275A patent/JPS5278776A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5278776A (en) | 1977-07-02 |