JPS5539902B2 - - Google Patents
Info
- Publication number
- JPS5539902B2 JPS5539902B2 JP113174A JP113174A JPS5539902B2 JP S5539902 B2 JPS5539902 B2 JP S5539902B2 JP 113174 A JP113174 A JP 113174A JP 113174 A JP113174 A JP 113174A JP S5539902 B2 JPS5539902 B2 JP S5539902B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Weting (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP113174A JPS5539902B2 (fr) | 1973-12-29 | 1973-12-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP113174A JPS5539902B2 (fr) | 1973-12-29 | 1973-12-29 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5099685A JPS5099685A (fr) | 1975-08-07 |
| JPS5539902B2 true JPS5539902B2 (fr) | 1980-10-14 |
Family
ID=11492877
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP113174A Expired JPS5539902B2 (fr) | 1973-12-29 | 1973-12-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5539902B2 (fr) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57502256A (fr) * | 1981-01-05 | 1982-12-23 |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5935429A (ja) * | 1982-08-12 | 1984-02-27 | インタ−ナシヨナル ビジネス マシ−ンズ コ−ポレ−シヨン | 半導体ウエハの製造方法 |
| US4944836A (en) * | 1985-10-28 | 1990-07-31 | International Business Machines Corporation | Chem-mech polishing method for producing coplanar metal/insulator films on a substrate |
| NL8700033A (nl) * | 1987-01-09 | 1988-08-01 | Philips Nv | Werkwijze voor het vervaardigen van een halfgeleiderinrichting van het type halfgeleider op isolator. |
| JP2643262B2 (ja) * | 1988-03-23 | 1997-08-20 | 日本電気株式会社 | 半導体装置の製造方法 |
| JP6411759B2 (ja) * | 2014-03-27 | 2018-10-24 | 株式会社フジミインコーポレーテッド | 研磨用組成物、その使用方法、及び基板の製造方法 |
-
1973
- 1973-12-29 JP JP113174A patent/JPS5539902B2/ja not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57502256A (fr) * | 1981-01-05 | 1982-12-23 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5099685A (fr) | 1975-08-07 |