JPS5538049B2 - - Google Patents

Info

Publication number
JPS5538049B2
JPS5538049B2 JP15868476A JP15868476A JPS5538049B2 JP S5538049 B2 JPS5538049 B2 JP S5538049B2 JP 15868476 A JP15868476 A JP 15868476A JP 15868476 A JP15868476 A JP 15868476A JP S5538049 B2 JPS5538049 B2 JP S5538049B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP15868476A
Other languages
Japanese (ja)
Other versions
JPS5382173A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP15868476A priority Critical patent/JPS5382173A/ja
Publication of JPS5382173A publication Critical patent/JPS5382173A/ja
Publication of JPS5538049B2 publication Critical patent/JPS5538049B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP15868476A 1976-12-27 1976-12-27 Positioning method Granted JPS5382173A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15868476A JPS5382173A (en) 1976-12-27 1976-12-27 Positioning method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15868476A JPS5382173A (en) 1976-12-27 1976-12-27 Positioning method

Publications (2)

Publication Number Publication Date
JPS5382173A JPS5382173A (en) 1978-07-20
JPS5538049B2 true JPS5538049B2 (US20030157376A1-20030821-M00001.png) 1980-10-02

Family

ID=15677090

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15868476A Granted JPS5382173A (en) 1976-12-27 1976-12-27 Positioning method

Country Status (1)

Country Link
JP (1) JPS5382173A (US20030157376A1-20030821-M00001.png)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6224259A (ja) * 1985-03-15 1987-02-02 Rohm Co Ltd 手動による電子部品のマスク位置合せ方法
JP2530950Y2 (ja) * 1990-07-05 1997-04-02 カシオ計算機株式会社 基板のアライメントパターン
JP5324206B2 (ja) * 2008-12-18 2013-10-23 日本電信電話株式会社 位置合わせ方法、ホトマスクおよびウエハ

Also Published As

Publication number Publication date
JPS5382173A (en) 1978-07-20

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