JPS5537879U - - Google Patents

Info

Publication number
JPS5537879U
JPS5537879U JP12169778U JP12169778U JPS5537879U JP S5537879 U JPS5537879 U JP S5537879U JP 12169778 U JP12169778 U JP 12169778U JP 12169778 U JP12169778 U JP 12169778U JP S5537879 U JPS5537879 U JP S5537879U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12169778U
Other languages
Japanese (ja)
Other versions
JPS58697Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1978121697U priority Critical patent/JPS58697Y2/ja
Publication of JPS5537879U publication Critical patent/JPS5537879U/ja
Application granted granted Critical
Publication of JPS58697Y2 publication Critical patent/JPS58697Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP1978121697U 1978-09-04 1978-09-04 スパッタ用タ−ゲット Expired JPS58697Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1978121697U JPS58697Y2 (ja) 1978-09-04 1978-09-04 スパッタ用タ−ゲット

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1978121697U JPS58697Y2 (ja) 1978-09-04 1978-09-04 スパッタ用タ−ゲット

Publications (2)

Publication Number Publication Date
JPS5537879U true JPS5537879U (enExample) 1980-03-11
JPS58697Y2 JPS58697Y2 (ja) 1983-01-07

Family

ID=29079093

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1978121697U Expired JPS58697Y2 (ja) 1978-09-04 1978-09-04 スパッタ用タ−ゲット

Country Status (1)

Country Link
JP (1) JPS58697Y2 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57145981A (en) * 1981-03-03 1982-09-09 Toshiba Corp Target for sputtering device

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5648773U (enExample) * 1979-09-20 1981-04-30

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5648773U (enExample) * 1979-09-20 1981-04-30

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57145981A (en) * 1981-03-03 1982-09-09 Toshiba Corp Target for sputtering device

Also Published As

Publication number Publication date
JPS58697Y2 (ja) 1983-01-07

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