JPS5537101B2 - - Google Patents
Info
- Publication number
- JPS5537101B2 JPS5537101B2 JP15048976A JP15048976A JPS5537101B2 JP S5537101 B2 JPS5537101 B2 JP S5537101B2 JP 15048976 A JP15048976 A JP 15048976A JP 15048976 A JP15048976 A JP 15048976A JP S5537101 B2 JPS5537101 B2 JP S5537101B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Photosensitive Polymer And Photoresist Processing (AREA)
- Local Oxidation Of Silicon (AREA)
- Weting (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15048976A JPS5373972A (en) | 1976-12-14 | 1976-12-14 | Manufacture for semiconductor device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15048976A JPS5373972A (en) | 1976-12-14 | 1976-12-14 | Manufacture for semiconductor device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5373972A JPS5373972A (en) | 1978-06-30 |
| JPS5537101B2 true JPS5537101B2 (en:Method) | 1980-09-25 |
Family
ID=15497979
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15048976A Granted JPS5373972A (en) | 1976-12-14 | 1976-12-14 | Manufacture for semiconductor device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5373972A (en:Method) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58105551A (ja) * | 1981-11-20 | 1983-06-23 | Fujitsu Ltd | 半導体装置 |
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1976
- 1976-12-14 JP JP15048976A patent/JPS5373972A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5373972A (en) | 1978-06-30 |